Chengkuo Lee

Assistant Professor

PhD The Univ. of Tokyo, Japan; 1996
MSc Rutgers Univ., New Brunswick, NJ, USA; 1993
MSc National Tsinghua Univ., Taiwan; 1991
Joint-appointed SMTS (Senior member of technical staff) of IME (Institute of Microelectronics), A*STAR, Singapore

 (65) 6516 5865 Click here to Email

Professional Working Experience

Full time occupation:
1.Co-founder & Vice President, Asia Pacific Microsystems, Inc. (APM, 
Inc.), Hsinchu, Taiwan [2001.09]
2.MEMS Devise Department Manager, Metrodyne Microsystems Co. Ltd., 
Hsinchu, Taiwan [1997.09]
3.Senior Engineer, Industrial Technology Research Institute (ITRI), 
Hsinchu, Taiwan [1997.01]
4.JST Fellow; MEMS & Packaging Group, Adv. Manufacturing Research 
Institute, AIST, Tsukuba, Japan [1996.01]		

Adjunct occupation:
1.Adjunct Assistant Professor, Institute of Precision Eng., National 
Chung Hsing University, Taichung, Taiwan [2001.09-2005.01]
2.Adjunct Assistant Professor, Dept. of Electrophysics, National 
Chiao-Tung University, Hsinchu, Taiwan [1997.09-1998.06]
3.Associate Foreign Researcher, Nanometer-scale Manufacturing Sci. 
Lab., Research Center of Advanced Sci. & Tech. (RCAST), The 
University of Tokyo [1993.04-1996.03]

Professional Activities

Professional Affiliation:
Member of Materials Research Society (Since 1992)
Member of IEEE (Since 1994)
Member of IEE Japan (Since 1996)

International/National Seminars and Public Talks:		
1.Optical Micro-NanoSystems:Technology Overview & Business¡@
Opportunity, Public talk at 2nd Seminar of The Frontier of Nano Tech 
& Business, hosted by Fukuoka Nano Technology Promotion Conference 
and Fukuoka Industry, Science & Technology Foundation, Fukuoka, 
Japan. (21 June, 2006)

Academic Leave / Exchange Program:
1.Academic leave at the University of Tokyo (hosted by 
Prof. ITOH, Toshihiro) under JSPS program, 12 June to 17 June 2006 
to conduct research related to "MEMS Based Solutions: Wireless 
Sensing Network Modules for Bird Influenza."
2.Academic leave at Kyushu University (hosted by 
Prof. SAWADA, Renshi) under JSPS program, 18 June to 23 June 2006 to 
conduct research related to "Micro-displacement sensor based on SiP 
(System-in-a-package) technology."	

Research Interest

Openings for course based MSc program students doing research 
projects:
a) MEMS Microrelay - Singaporean and/or PR (with scholarship)
b) Mirrors for Optical MEMS Applications
c) Thermoelectric based micro-power-generator
d) Nanobiophotonics and Lab-on-a-chip devices
e) Optical Biomedical devices for analysis of cells and DNAs
f) Materials characterization and process development for advanced 
packaging technologies for 3D-ICs, MEMS and NEMS

The following research subjects are welcome for PhD applicants
1.BioMEMS, Lab-on-a-chip and Nanobiophotonics
2.Optical MEMS and Nanophotonics
3.MEMS Energy Harvesters / Micro-scale power sources
4.SiP (System-in-package) and SOP (System-on-a-package) Technologies:
Wafer-level packaging; Wafer-level vacuum packaging; Wafer-level 
interconnects; Vertical vias; 3D packaging; MEMS and Microsystem 
Packaging; Optical interconnects; Self-assembly; Packaging 
techniques for Nanoelectromechanical Systems (NEMS); Packaging 
techniques for Nanophotonics and photonics crystal devices

5. Nanoelectromechanical Systems (NEMS)
6.Fundamentals and Applications of Actuators in Micro\Nanometer Scale
7.Business Models and Strategy in MEMS and Nanotechnology; 
Intellectual Property Strategy in MEMS and Nanotechnology

Research Projects

1.Development of Novel Variable Optical Attenuators (R-263-000-358-
112/133): Joint research project between NUS and IME, A*STAR, 
SGD174K with additional in-kind of monetary value of SGD166K from 
IME (Apr. 2006 to Mar. 2009).

2. Low Temperature Wafer Bonding for MEMS Packaging (IME06-420004):  
SGD244K from IME, A*STAR (Dec. 2006 to Jun. 2008).

3. Si MEMS (Microelelctromechanical Systems) based energy harvesters 
for wireless medical sensor nodes (A*Star, SERC Grant No. 
0621150043):Home2015 Programme Office, A*STAR, SGD225K with 
additional in-kind of monetary value of SGD320K from IME, A*STAR, 
(Apr. 2007 to Apr. 2009).

Spin-off Companies

Asia Pacific Microsystems, Inc. (APM):
He co-founded the APM, Hsinchu, Taiwan, in Aug. 2001, and he has 
been the vice president of R&D at the beginning, then became the VP 
of optical communication business unit in 2002. Since 2005 he became 
the special assistant of CEO in charge of international business and 
technical marketing for MEMS foundry service at APM, Inc. APM has 
achieved annual revenue of 13M US$ in 2005 and was ranked as top 
number 30 and 29 of world MEMS manufacturers in 2004 and 2005, 
respectively. 		
http://www.apmsinc.com/

Patents Granted

1.US 6300554: Oct. 9, 2001, Method of fabricating thermoelectric 
sensor and thermoelectric sensor device,Inventors: Chen-Hsun Du, 
Bruce C. S. Chou, Chengkuo Lee.
2.US 6505520 B1: Jan. 14, 2003, Method for preparing a thermal 
pulsed micro flow sensor,Inventors: Chien-Chung Fu, Chengkuo Lee, 
Ching-Yi Wu.
3.US 6703763 B2: Mar. 9, 2004, Bulk acoustic wave multiplexer, 
Inventors: Shu-Hui Tasi and Chengkuo Lee.
4.US 6784020 B2: Aug. 31, 2004, Package structure and method for 
making the same, Inventors: Chengkuo Lee and Yi-Mou Huang.
5.US 6804036 B1: Oct. 12, 2004, Optical switch,Inventors: Wen-Chih 
Chen, Chia-Yu wu, and Chengkuo Lee.
6.US 6901182 B2: May. 31, 2005, Retro-reflective type optical signal 
processing device and method,Inventors:Jer-Liang A. Yeh, Chih-Chung 
Chen, Yen-Jyh Lai, Wen-Chih Chen, and Chengkuo Lee.
7.US 6947657 B1: Sep. 20, 2005, Variable optical attenuator, 
Inventors: Chih-Chung Chen and Chengkuo Lee.
8.US 6996306 B2: Feb.7, 2006, Electrostatically operated micro-
optical devices and method for manufacturing thereof,Inventors: Chih-
Chung Chen, Chengkuo Lee, Yen-Jyh Lai, Wen-Chih Chen, and Ming-Hung 
Tsai.		

Selected Publications

International Journal Articles & Letters:

1.Chengkuo Lee, A MEMS VOA Using Electrothermal Actuators, IEEE J. 
Lightwave Technol. Vol. 25, No.2, pp.490-498, Feb. 2007.
2.Chengkuo Lee, Progress in wafer level MEMS packaging, J. of Japan 
Institute of Electronics Packaging, Vol. 10, No.1, pp. 42-51, Jan. 
2007.
3.Chengkuo Lee, Electrothermally Driven MEMS VOA Using Planar Light 
Attenuation Scheme Based on Rotational and Translational 
Misalignment,Microsystem Technologies, Vol. 13, No.1, pp. 41-48, 
Jan. 2007.
4.Chengkuo Lee, Novel H-beam Electrothermal Actuators with 
Capability of Generating Bi-directional Static Displacement,
Microsystem Technologies. Vol. 12, No. 7, pp. 717-722, Jul. 2006.
5.J. Andrew Yeh, Shiue-Shr Jiang, Chengkuo Lee, MOEMS variable 
optical attenuators using rotary comb drive actuators,IEEE 
Photonics Tech. Letters. Vol.18, No. 10, pp.1170-1172, May. 15, 2006.
6.Chengkuo Lee and J. Andrew Yeh, Development of electrothermal 
actuation based planar variable optical attenuators (VOAs),J. of 
Physics: Conf. Series, Institute of Physics Publishing, Vol. 34, pp. 
1026-1031, 2006.
7.Chengkuo Lee, MOEMS Variable Optical Attenuator with Robust 
Design for Improved Dynamic Characteristics,IEEE Photonics Tech. 
Letters, Vol. 18, No. 6, pp.773-775, Mar. 15, 2006.
8.Chengkuo Lee, Arrayed Variable Optical Attenuator Using Retro-
Reflective MEMS Mirrors,IEEE Photonics Tech. Letters, Vol. 17, 
No.12, pp.2640-2642, Dec. 2005.
9.Yen-Sheng Lu, Yuan-Peng Huang, J. Andrew Yeh, Chengkuo Lee and Yu-
Hua Chang, Controllability of Non-contact Cell Manipulation by 
Image Dielectrophoresis (IDEP), Optical and Quantum Electronics, 
Vol. 37, pp.1385-1395, 2005.
10.Chengkuo Lee, Monolithic-integrated 8CH MEMS variable optical 
attenuator, Sensors and Actuators A, Vol.123-124, pp.596-601, 2005.
11.Wen-Chih Chen, Chengkuo Lee, Chia-Yu Wu, and W. Fang,A New 
Latched 2x2 Optical Switch Using Bi-directional Movable 
Electrothermal H-Beam Actuators,Sensors and Actuators A,Vol.123-124, 
pp.563-569, 2005.
12.Chengkuo Lee, and J. Andrew Yeh, Development of X-Beam 
Electrothermal Actuators,Microsystem Technologies. Vol.11, No.7, pp. 
550-555, Jul. 2005.
13.Chengkuo Lee, Yen-Jyh Lai, Chia-Yu Wu, J. Andrew Yeh, and Ruey-
Shing Huang,Feasibility Study of Self-assembly Mechanism for 
Variable Optical Attenuator,J. Micromech. Microeng. Vol. 15, No.1, 
pp.55-62,Jan. 2005.
14.Chengkuo Lee, and Chia-Yu Wu,Study of Electrothermal V-Beam 
Actuators and Latched Mechanism for Optical Switch,J. Micromech. 
Microeng. Vol. 15, No. 1, pp. 11-19, Jan. 2005.
15.Chihchung Chen, Chengkuo Lee, and J. Andrew Yeh,Retro-Reflection 
Type MOEMS VOA,IEEE Photonics Tech. Letters, Vol.16,No.10, pp.2290-
2292, Oct. 2004.
16.Chihchung Chen and Chengkuo Lee, Design and Modeling for Comb 
Drive Actuator with Enlarged Static Displacement,Sensors & Actuators 
A, Vol. 115, No.2-3, pp. 530-539, 2004.
17.Chengkuo Lee, Epitaxial Silicon Micromirror Devices for Optical 
Scanning Applications,Sensors & Actuators A,Vol.115,No.2-3,pp.581-
590, 2004.
18.Chengkuo Lee, and Yu-Shen Lin,A New Mircomechanism for 
Transformation of Small Displacements to Large Rotations for A 
VOA,IEEE Sensors Journal, Vol. 4, No. 4, pp. 503-509, Aug. 2004.
19.Wen-Chih Chen, Chia-Yu Wu, and Chengkuo Lee, Characterization of 
Bi-stable Micromechanism Based on Buckle Spring and Electrothermal V-
Beam Actuators,Jpn. J. Appl. Phys.,Vol. 43, No.6B, pp.3892-3895,2004.
20.Chengkuo Lee, Yen-Jyh Lai, Yu-Shen Lin, Chia-Yu Wu, Chihchung 
Chen, Ming Hung Tasi, Shih-Yun Hung, Yi-Mou Huang, Ruey-Shing Huang, 
and Min-Shyong Lin, Development of Surface Micromachined Mechanism 
for Movement Translation and Displacement Amplification,
Jpn. J. Appl. Phys., Vol. 43, No.6B, pp. 3887-3891, 2004.
21.Chengkuo Lee, Yen-Jyh Lai, Chia-Yu Wu, Yu-Shen Lin, Ming Hung 
Tasi, Ruey-Shing Huang, and Min-Shyong Lin, Scratch Drive Actuator 
Driven Self-assembled Variable Optical Attenuator,Jpn. J. Appl. 
Phys., Vol. 43, No.6B, pp. 3906-3909, 2004.
22.Chengkuo Lee, Yu-Shen Lin, Yen-Jyh Lai, Ming Hung Tasi, Chihchung 
Chen, and Chia-Yu Wu,3-V Driven Pop-up Micromirror for Reflecting 
Light Toward Out-of-plane Direction for VOA Applications,IEEE 
Photonics Tech. Letters, Vol. 16, No. 4, pp. 1044-1046, Apr. 2004.
23.Chihchung Chen, Chengkuo Lee, and Yen-jyh Lai, Novel VOA Using 
In-Plane Reflective Micromirror and Off-Axis Light Attenuation,
IEEE Communications Mag., Vol. 41, pp. S16-S20, Aug. 2003.
24.Chihchung Chen, Chengkuo Lee, Yen-jyh Lai, and Wen-Chih Chen, 
Development and Application of Lateral Comb Drive Actuator,Jpn. J. 
Appl. Phys. Vol. 42, Part. 1, 6B, pp.4059-4062, Jun 2003.
25.Yen-Jyh Lai, Chengkuo Lee, Chia-Yu Wu, Wen-Chih Chen, Chihchung 
Chen, Yu-Shen Lin, Weileun Fang, and Ruey-Shing Huang,Development of 
Electrothermal Actuator with Optimized Motion Characteristics,
Jpn. J. Appl. Phys. Vol. 42, Part. 1, 6B, pp.4067-4073, Jun 2003.
26.C.-H. Du and C. Lee, Characterization of Thermopile Based on 
Complementary-Metal-Oxide-Semiconductor (CMOS) Materials and Post 
CMOS Micromachining,Jpn. J. Appl. Phys.,Vol. 41, pp.4340-4345, 2002.
27.Shih-Chin Gong and C. Lee, Analytical Solutions of Sensitivity 
for Pressure Microsensors,IEEE Sensors Journal, Vol.1, No.4, pp.340-
344, 2001. 
28.J.-J. Tsaur, C.-H. Du, and C. Lee,Investigation of TMAH for 
front-side Bulk Micromachining Process from Manufacturing Aspect,
Sensors & Actuators A, Vol. 92, pp. 375-383, 2001.
29.C.-H. Du and C. Lee, 3D Thermoelectric Structures Derived from 
A New Mixed Micromachining Process, Jpn. J. Appl. Phys., Vol. 39, 
pp.7125-7129, 2000.
30.C. Lee, J.-S. Shie, and W.-F. Huang, Wafer Bonding by Low 
Temperature Soldering,Sensors & Actuators A, Vol. 85,pp.330-334,2000.
31.A. Schroth, C. Lee, S. Matsumoto, and R. Maeda, Application of 
Sol-gel Deposited Thin PZT Film for Actuation of 1D and 2D Scanners, 
Sensors & Actuators A, Vol.73, pp.144-152, 1999.
32.C. Lee, T. Itoh, and T. Suga, Self-excited Piezoelectric PZT 
Microcantilevers for Dynamic SFM-with Inherent Sensing and 
Actuating Capabilities,Sensors & Actuators A, Vol.72,pp.179-188,1999.
33.J. Chu, T. Itoh, C. Lee, K. Watanabe, and T. Suga,A Novel High 
Vacuum Scanning Force Microscope Using Piezoelectric Cantilever and 
Phase Detection Method, J. Vac. Sci. & Technol. B, Vol.15, pp.1551-
1555, 1997.
34.J. Chu, T. Itoh, C. Lee, K. Watanabe, and T. Suga, Frequency 
Modulation Detection HV-SFM with a Self-oscillating Piezoelectric 
Cantilever, J. Vac. Sci. & Technol. B, Vol.15, pp.1647-1651, 1997.
35.C. Lee, T. Itoh, R. Maeda, T. Ohashi, and T. Suga,Development of 
a Piezoelectric Self-excitation and Self-detection Mechanism of PZT 
Microcantilevers for Dynamic SFM in liquid,J. Vac. Sci. & Technol.B, 
Vol.15, pp.1559-1563, 1997.
36.C. Lee, T. Itoh, and T. Suga,Sol-gel Derived PNNZT Thin Films 
for Micromachined Piezoelectric Force Sensors,Thin Solid Films, 
Vol.299, pp.88 ?93, 1997.
37.C. Lee, T. Itoh, R. Maeda, and T. Suga, Characterization of 
Micromachined Piezoelectric PZT Force Sensors for Dynamic Scanning 
Force Microscopy, Review of Scientific Instruments, Vol.68, pp.2091-
2100, 1997.
38.C. Lee, T. Itoh, and T. Suga, Micromachined Piezoelectric Force 
Sensors Based on PZT Thin Films, IEEE Trans. Ultrasonics, 
Ferroelectrics, and Frequency control, Vol.43, pp.553-559, 1996.
39.T. Itoh, C. Lee, and T. Suga, Deflection Detection and Feedback 
Actuation Using a Self-excited Piezoelectric Pb(Zr,Ti)O3 
Microcantilever for Dynamic Scanning Force Microscopy, Appl. Phys. 
Lett., Vol.69, pp.2036-2038, 1996.
40.C. Lee, S. Kawano, T. Itoh, and T. Suga, Characteristics of Sol-
gel Derived PZT Thin Films with Lead Oxide Cover Layers and Lead 
Titanate Interlayers, J. Mater. Sci., Vol.31, pp.4559-68, 1996.
41.C. Lee, T. Itoh, G. Sasaki, and T. Suga, Sol-Gel Derived PZT 
Force Sensor for Scanning Force Microscopy, Mater. Chem. and Phys., 
Vol.44, pp.25-29, 1996.
42.C. Lee, I. N. Lin, and C. T. Hu, Evolution of Microstructure and 
V-shaped Positive Temperature Coefficient of Resistivity of 
(Pb0.6Sr0.4)TiO3 Materials, J. Am. Ceramic Soc., Vol. 77, pp.1340-
1344, 1994.


Referenced International Conference Papers and Extended Abstracts:

1.J. A. Yeh and C. Lee, Low Voltage Driven Rotary Comb Actuator for 
MEMS VOA with Fast Response Time, CD-ROM Proceedings of APCOT 2006, 
AT-A0286, Singapore, Jun. 25-28, 2006.
2.C. Lee and J. A. Yeh, Development of Robust MEMS VOAs Using 
Electrothermal Actuators and Planar Light Attenuation Scheme,ISMNT-
2, The 2nd International Symposium on Micro & Nano Technology, 
pp.88~91, Hsinchu, Taiwan, Mar. 29-31, 2006.
3.Y.-S. Lu and J. Andrew Yeh, and C. Lee, Continuous Cell Separation 
and Single Cell Manipulation Using Image Dielectrophoresis, 
Proceedings of the 2nd International Meeting on Microsensors and 
Microsystems, Tainan, Taiwan, pp. 34, Jan. 15-18, 2006.
4.C. Lee and J. Andrew Yeh, Characterization of a Multi-channeled 
Optical Microsystem, Proceedings of the 2nd International Meeting 
on Microsensors and Microsystems, Tainan, Taiwan, pp.75, Jan.15-18, 
2006.
5.Y. P. Huang, Y. S. Lu, Y. H. Chang, J. A. Yeh and Chengkuo Lee, 
Continuous Cell Sorting and Interactive Cell Handling on Channel-
less Chips Using Image Dielectrophoresis, IEEE Transducers05, 
the 13th Intern. Conf. on Solid-State Sensors, Actuators and 
Microsystems, Seoul, Korea, pp. 1696-1699, June 5-9, 2005.
6.Yen-Sheng Lu, Yuan-Peng Huang, J. Andrew Yeh, and Chengkuo Lee, 
Image Driven Cell Manipulation using Optical Dielectrophoresis 
(ODEP), The 2nd Asian and Pacific Rim Symposium on Biophotonics 
(APBP 2004), Taipei, Taiwan, pp.238-239, Dec. 15-17, 2004.
7.Chengkuo Lee, and Chia-Yu Wu, Characterizations and Applications 
of Electrothermal H-beam Actuators,Proc.CD-ROM of Eurosensors XVIII, 
Rome, Italy, P.2.41, pp. 504-505, Sept. 12-15, 2004.
8.Chengkuo Lee, Chihchung Chen, Ming Hung Tasi, Yen-jyh Lai, Shih-
Yun Hung, Ruey-Shing Huang, and Min-Shyong Lin, Monolithically 
Integrated Multi-Channels MEMS VOA for WDM Applications, Proc.CD-ROM 
of Eurosensors XVIII, Rome, Italy,P.2.85,pp. 591-592,Sept.12-15,2004.
9.Chengkuo Lee, Yen-jyh Lai, Ming Hung Tsai, Chihchung Chen, Shih-
Yun Hung, Chia-Yu Wu, and Min-Shyong Lin, 8CH MEMS Variable 
Optical Attenuator, Proceeding of ECOC 04 (30th European Conf. on 
Optical Communication),Stockholm,Sweden, Vol.1, Mo4.6.5, pp.116-117, 
Sept. 5-9, 2004.
10.Chia-Yu Wu and Chengkuo Lee, Latched Optical Switch Using H-Beam 
Electrothermal Actuators, Proc. of IEEE/LEOS International Conf. on 
Optical MEMS 2004, Takamtsu, Japan, pp.104-105, Aug. 22-26, 2004.
11.Chengkuo Lee, Ming Hung Tsai, Chia-Yu Wu, Shih-Yun Hung, 
Chihchung Chen, Yen-jyh Lai, Min-Shyong Lin, and J. Andrew Yeh, 
Characterization of MOEMS VOA Based on Various Planar Light 
Attenuation Configurations, Proc. of IEEE/LEOS International Conf. 
on Optical MEMS 2004, Takamtsu, Japan, pp.98-99, Aug. 22-26, 2004.
12.Chengkuo Lee, Chihchung Chen, Yen-jyh Lai, Shih-Yun Hung, Ming 
Hung Tasi, Chia-Yu Wu, Ruey-Shing Huang, and Min-Shyong Lin, Bulk 
Micromachined Tilted Mirrors for Variable Optical Attenuator,APCOT 
MNT 04 (Asia-Pacific Conf. of Transducers and Micro-Nano Technology 
2004), PO2-81, July 4-8, 2004, Sapporo, Japan.
13.Chia-Yu Wu, Chengkuo Lee, and Ruey-Shing Huang, Development of 
H-Beam Electrothermal Actuators for Latched Optical Switch, APCOT 
MNT 04 (Asia-Pacific Conf. of Transducers and Micro-Nano Technology 
2004), PO2-79, July 4-8, 2004, Sapporo, Japan.
14.Chihchung Chen, Chengkuo Lee, Chia-Yu Wu, Hong-Da Lee, Wen-Chih 
Chen, and Ruey-Shing Huang, Novel X-shaped Electrothermal Actuators 
with Large Displacement, APCOT MNT 04 (Asia-Pacific Conf. of 
Transducers and Micro-Nano Technology 2004), PO2-67, July 4-8, 2004, 
Sapporo, Japan.
15.Chia-Yu Wu, Wen-Chih Chen, Chengkuo Lee, Ming Hung Tsai, Ruey-
Shing Huang, and Min-Shyong Lin, Characterization of latched optical 
switch using electrothermal V-beam actuators, Proc. CD-ROM of 
CLEO/Pacific Rim 2003, The 5th Pacific Rim Conference on Lasers 
and Electro-Optics co-sponsored by Optical Society of America,IEEE/ 
Lasers and Electro-Optics Society, PD-(15)-8, Dec. 15~19, 2003, 
Taipei, Taiwan.
16.Chengkuo Lee, Yen-jyh Lai, Yu-Shen Lin, Ruey-Shing Huang, and Min-
Shyong Lin,Development of Novel Micromechanism for Movement 
Translation and Out-of-plane Displacement Amplification, Proc.CD-ROM 
of CLEO /Pacific Rim 2003, The 5th Pacific Rim Conference on Lasers 
and Electro-Optics co-sponsored by Optical Society of America, IEEE/ 
Lasers and Electro-Optics Society, THP-(15)-2, Dec. 15~19, 2003, 
Taipei, Taiwan.
17.Chihchung Chen, Chengkuo Lee, Yen-jyh Lai, Wen-Chih Chen, and 
Ming Hung Tsai, Reflective Type VOA Using Off-axis Light 
Attenuation Scheme, Proc. CD-ROM of CLEO /Pacific Rim 2003, The 5th 
Pacific Rim Conference on Lasers and Electro-Optics co-sponsored by 
Optical Society of America, IEEE/Lasers and Electro-Optics Society, 
WP-(15)-1, Dec. 15~19, 2003, Taipei, Taiwan.
18.Yen-Jyh Lai, Chia-Yu Wu, Chengkuo Lee, Yu-Shen Lin, Wen-Chih 
Chen, Chihchung Chen, Ming-Hung Tsai, Ruey-Shing Huang, and Min-
Shyong Lin, Out-of-plane MEMS shutter with continuous motion 
capability for VOA application, Proc. CD-ROM of CLEO /Pacific Rim 
2003, the 5th Pacific Rim Conf. on Lasers and Electro-Optics co-
sponsored by Optical Society of America, IEEE/Lasers and Electro-
Optics Society, W1I-(15)-1, Dec. 15~19, 2003, Taipei, Taiwan.
19.Yen-Jyh Lai, Chia-Yu Wu, Chengkuo Lee, Yu-Shen Lin, Wen-Chih 
Chen, Chihchung Chen, Ruey-Shing Huang, and Min-Shyong Lin, Design 
and characterization of electrothermal actuator from reliability and 
robust aspects, Proc. CD-ROM of CLEO /Pacific Rim 2003, the 5th 
Pacific Rim Conference on Lasers and Electro-Optics co-sponsored by 
Optical Society of America, IEEE/Lasers and Electro-Optics Society, 
TU4I-(15)-6, Dec. 15~19, 2003, Taipei, Taiwan.
20.Chengkuo Lee and Yu-Shen Lin, Novel Micromechanism of 
Transferring In-plane Displacement into Out-of-plane Motion for 
Optical MEMS, Proceedings of ICMT 2003, 7th International Conf. on 
Mechatronics Technology, Taipei, Taiwan, pp.391-396, Dec. 2-6, 2003.
21.Chengkuo Lee, Yen-Jyh Lai, Chia-Yu Wu, Yu-Shen Lin, Ming Hung 
Tasi, and Ruey-Shing Huang, Self-assembled Continuously Movable 
MEMS Shutter and Corrugated Curved Beam Electrostatic Actuator for 
Variable Optical Attenuator Application, Proceedings of ICMT 2003, 
7th International Conference on Mechatronics Technology, Taipei, 
Taiwan, pp.300-305, Dec. 2-6, 2003.
22.Wen-Chih Chen, Chia-Yu Wu, and Chengkuo Lee, Characterization 
of Chevron Type Electrothermal Actuators and Bi-stable 
Micromechanisms for Optical Switch, Proceedings of ICMT 2003, 7th 
International Conf. on Mechatronics Technology, Taipei, Taiwan, pp. 
403-407, Dec. 2-6, 2003.
23.Yen-jyh Lai, Chengkuo Lee, Chia-Yu Wu, Yu-Shen Lin, Ming Hung 
Tasi, Ruey-Shing Huang, and Min-Shyong Lin, Fabrication of 
Corrugated Curved Beam Type Electrostatic Actuator and SDA Driven 
Self-assembled Mechanism for VOA Applications, Digest of 
Microprocesses & Nanotechnology 2003, Tokyo, Japan, pp. 286-287, 
Oct. 28-31, 2003.
24.Wen-Chih Chen, Chia-Yu Wu, and Chengkuo Lee, Bi-directional 
Movable Latched Micromechanism Using One-directional Movable Chevron 
Electrothermal Actuators for Switch and Relay Applications, Digest 
of Microprocesses & Nanotechnology 2003, Tokyo, Japan, pp. 180-181, 
Oct. 28-31, 2003.
25.Chengkuo Lee, Yu-Shen Lin, Yen-jyh Lai, Ming Hung Tsai, Chihchung 
Chen, Chia-Yu Wu, and Ruey-Shing Huang, New Out-of-plane Light 
Attenuation Scheme Based on Surface Micromachined Pop-up Mirror and 
Movement Translation Micromechanism, Digest of Microprocesses & 
Nanotechnology 2003, Tokyo, Japan, pp. 174-175, Oct. 28-31, 2003.
26.Yen-Jyh Lai, Chengkuo Lee, Chia-Yu Wu, Yu-Shen Lin, and Ming Hung 
Tsai, Self-assembled Axial Type Variable Optical Attenuator Using 
Continuously Movable Pop-up MEMS Mirror, Proc. MOC03, 9th 
Microoptics Conf., Tokyo, Japan, pp. 96-99, Oct. 29-31, 2003.
27.Wen-Chih Chen, Chia-Yu Wu, and Chengkuo Lee, Development of Bi-
directional Electrothermal V-beam Actuators for Latched Optical 
Switch, Proc. MOC03, 9th Microoptics Conf., Tokyo, Japan, pp. 136-
139, Oct. 29-31, 2003.
28.Chengkuo Lee, PZT Films for MicroElectroMechanical (MEM) 
Applications,Presentation materials in IUMRS-ICAM 2003, Yokohama, 
Japan, Oct. 8-13, 2003. (Invited Talk)
29.Chengkuo Lee and Chun-Kai Liu, Vertical Comb Driven 1D and 2D 
Optical Scanning Mirrors Using Epi-Si Micromachining Process, Proc. 
CD-ROM of Eurosensors XVII, 17th European Conf. On Solid-State 
Transducers, Guimaraes, Portugal, pp.338-391, Sept. 21-24, 2003.
30.Chihchung Chen and Chengkuo Lee, Development of Comb Drive with 
New Compressive Suspension Spring for Large Static Displacement and 
Continuous Motion Applications, Proc. CD-ROM of Eurosensors XVII, 
17th European Conf. On Solid-State Transducers, Guimaraes, Portugal, 
pp.536-539, Sept. 21-24, 2003.
31.Chun-Kai Liu, Chengkuo Lee, Chun Ren Cheng, Yi-Mou Huang, Shih-
Yun Hung, Ruey-Shing Huang, and Min-Shyong Lin, Characteristics of 
1D and 2D Optical Scanning Epi-Si-Mirror Devices, Proc. of 2003 
IEEE/LEOS International Conf. on Optical MEMS 2003, Waikoloa, 
Hawaii, USA, Aug. 18-21, 2003, pp.155-156.
32.Wen-Chih Chen, Chia-Yu Wu, and Chengkuo Lee, Bi-directional 
Movable Latching Structure Using Electrothermal V-beam Actuators for 
Optical Switch Applications, Proc. of 2003 IEEE/LEOS International 
Conf. on Optical MEMS 2003, Waikoloa, Hawaii, USA, Aug. 18-21, 2003, 
pp.149-150.
33.Yen-Jyh Lai, Chengkuo Lee, Chia-Yu Wu, Ming-Hung Tasi, and Yu-
Shen Lin, Self-assembled out-of-plane movable vane for variable 
optical attenuator application, Proc. CD-ROM of IEEE Conf. On 
Lasers and Electro Optics 2003, CLEO 2003, CWA45, Baltimore, USA, 
June 3~5, 2003.
34.Yen-Jyh Lai, Chengkuo Lee, Chia-Yu Wu, Wen-Chih Chen, Chihchung 
Chen, Weileun Fang, Jer-Liang Andrew Yeh and Ruey-Shing Huang, 
Characterizations of Adhesion and Motion Behavior for 
Electrothermal Actuator, Digest of Microprocesses & Nanotechnology 
2002, Tokyo, Japan, pp. 308-309, Nov. 6-8, 2002.
35.Chihchung Chen, Chengkuo Lee, Yenjyh Lai, and Wen-Chih Chen, 
Study of Lateral Comb Drive Actuator with Large Displacement and 
Low Actuation Voltage, Digest of Microprocesses & Nanotechnology 
2002, Tokyo, Japan, pp. 304-305, Nov. 6-8, 2002.
36.R. S. Huang, Chengkuo Lee, and M. S. Lin, Micromachining 
Technology for Enabling System-in-a-Package, IMAPS Proc. of 
Advanced Tech. Workshop for Packaging of MEMS and Related Micro 
Integrated Nano Systems, Denver, CO, USA, Sept. 6-8, 2002.
37.Chengkuo Lee and Chun-Kai Liu, Development of Epi-Si Mirror 
Using Vertical Comb Drive Actuators, Proc. of 2002 IEEE/LEOS 
International Conf. on Optical MEMS 2002, Lugano, Switzerland, Aug. 
20-23, 2002, PD-1.
38.Chengkuo Lee, Challenges in Optical MEMS Commercialization and 
MEMS Foundry, Proc. of 2002 IEEE/LEOS International Conf. on Optical 
MEMS 2002, Lugano, Switzerland, Aug. 20-23, 2002, pp.157-158. 
(Invited Talk)
39.Min-Shyong Lin and Chengkuo Lee, Challenge of System-in-a-package 
and MEMS Technology, Proc. of Cool Chips V, An International 
Symposium on Low-power and High-Speed Chips, Tokyo, Japan, April 18-
20, 2002, Vol.1, p149-158. (Invited Talk)
40.Chengkuo Lee, R. S. Huang, and M. S. Lin, MEMS Foundry and 
Applications from Taiwan, Proc. of MSE Workshop, The 3rd Asian 
Workshop of MEMS-Package, The 1st Pacific Rim Meeting of Techno-
linkage of Microfabrication, Tsukuba, Japan, pp. 12-39, Feb. 20-22, 
2002. (Invited Talk)
41.Shu-Hui Tsai, Ching-Yee Chang, Chung-Hsien Lin, Chun-Hsien Lee, 
Chengkuo Lee, and Ruey-Shing Huang, Transmission-Line Model, 
Cascade-Matrix-Transform Method for Computing the Reflection of 
Grating Filters, Proceedings of SPIE, Asia-Pacific Optical 
Communications 2001, Nov.12 ~ 16, 2001, Beijing, China, Vol. 4581, 
p88-94.
42.Ching-Chen Tu, Cheng-Hsien Liu, Chen-Hsun Du, Jiunn-Jye Tsaur, 
and Chengkuo Lee, A Large-angle and Large-mirror Microscanner 
Based on Thermal Actuators, Proceedings of 2001 ASME International 
Mechanical Engineering Congress and Exposition, IMECE2001/MEMS-
23848, Nov. 11~16, 2001, New York, USA.
43.C.-H. Du and C. Lee, Characterization of Thermopile Based on 
CMOS Materials and Post CMOS Micromachining, Digest of 
Microprocesses & Nanotechnology 2001, Shimane, Japan, pp. 56-57, 
Oct.31-Nov.2, 2001.
44.Chun-Hsien Lee, Shu-Hui Tsai, Chung-Hsien Lin, Kuan-Jen Fang, Ju-
Mei Lu, Chengkuo Lee, Weileun Fang, Wide Tuning Ranged MEMS 
Varactors with Digital Selectable Capacitance, Proceedings of The 
International MEMS Workshop 2001,Singapore, p683-688, July 4-6, 2001.
45.C.-H. Lee, Z. Lin, S.-H. Tsai, K.-J. Fang, C. Lee, W. Fang,
Development of MEMS Varactors, Published in Design, Test, 
Integration and Packaging of MEMS/MOEMS, Cannes Mandelieu, France, 
2001.
46.Tim Shia, S.-I Yang, C. Lee, C.-M. Yao, and M.H. Lee,
Characterization and Design Optimization for CMOS Compatible MEMS,
Proceedings of SPIE, Micromachining and Microfabrication 2000, Vol. 
4175, p170-179, 2000.
47.J. Tsaur, S.-I Yang, C.-H. Du, Z. Lin, C. Huang and C. Lee, 
Development of TMAH Anisotropic Etching Manufacturing Process for 
MEMS, Proceedings of SPIE, Micromachining and Microfabrication 2000, 
Vol. 4174, p142-153, 2000.
48.C.-H. Du and C. Lee, Investigation of thermopile using CMOS 
compatible process and front-side Si bulk etching, Proceedings of 
SPIE, Micromachining and Microfabrication 2000, Vol. 4176, p168-177, 
2000. 
49.C.-H. Du and C. Lee, 3D Thermoelectric Structures Derived from 
A New Mixed Micromachining Process, Digest of Microprocesses & 
Nanotechnology 2000, Tokyo, Japan, pp. 150-151, July 11-13, 2000.
50.J.-J. Tsaur, Z. Lin, C.-H. Du, C. Lee, and R. Maeda,
Investigation of TMAH for Front-Side Bulk Micromachining Process 
from Manufacturing Aspect, Proc. of EUROSENSORS XIV, Aug. 27-30, 
2000, Copenhagen, Denmark, pp.479- 482.
51.C.-H. Du, Z. Lin, and C. Lee, Two-Level Thermoelectric Structures 
Based on CMOS Process, Proc. of EUROSENSORS XIV, Aug. 27-30, 2000, 
Copenhagen, Denmark, pp.33- 36.
52.C.-H. Du, Z. Lin, and C. Lee, Design and Characterization of 
CMOS Compatible Thermopile Using Front-side Bulk Micromachining, 
Tech. Digest of 17th Sensor Sympo. 2000, IEE Japan, May.30~31, 
pp.165-168.
53.C. Lee and C.-H. Du, Temperature Sensing Thermopile Based on 
Standard CMOS Foundry Process, Proc.of SENSOR EXPO.2000, pp.423-426, 
May 9-11, 2000, Anaheim, USA.
54.W.-M. Lin, C. Lee, A. Schroth, R. Maeda, Development of Micro 
Scanning Devices Actuated with PZT Thin Films, Proc. of MicroMat 
2000, pp.1216-1218, 3rd International Conference and Poster 
Exhibition of  Micro Materials 2000, Berlin, Germany, April 17-19, 
2000.
55.C.-H. Du and C. Lee, Optimization Criteria of CMOS Compatible 
Thermopile Sensors, Proceedings of SPIE, Intern. Symp. on 
Microelectronics and Micro-Electro-Mechanical Systems, Vol. 3893, 
p116-126, 1999.
56.W.-F. Huang, J.-S. Shie, C. Lee, S. C. Gong and C.-J. Peng, 
Development of Low-temperature Wafer level Vacuum Packaging for 
Microsensors, SPIE, Intern. Symp. on Microelectronics and Micro-
Electro-Mechanical Systems, Vol. 3893, p478-485, 1999.
57.C. Lee, J.-S. Shie and W.-F. Huang, Wafer Bonding by Low 
Temperature Soldering for Vacuum-sealed Microsensors, Eurosensors 
XIII, The Hague, The Netherlands, Book of Abstracts, p 141-142, 
Sept. 12-15, 1999.
58.W.-M. Lin, A. Schroth, S. Matsumoto, C. Lee, R. Maeda Two-
dimensional microscanner actuated by PZT thin film, Proceedings of 
SPIE, Intern. Symp. on Microelectronics and Micro-Electro-Mechanical 
Systems, Vol. 3892, p133-140, 1999.
59.A. Schroth, C. Lee, S. Matsumoto, M. Tanaka, and R. Maeda,
Application of Sol-gel Deposited Thin PZT film for actuation of 1D 
and 2D scanners, Proceedings of IEEE 11th Annual International 
Workshop on Microelectromechanical Systems, MEMS '98, p402-407, 
Heidelberg, Germany, IEEE 98CH36176, Jan. 25-29, 1998.
60.C. Lee, T. Itoh, R. Maeda, and T. Suga, Simultaneous 
Displacement Actuation and Detection, and Piezoelectric Excitation 
for SFM Cantilever and Its Array Using Piezoelectric PZT Thin 
Layer, Proc. Intern. Conf. Micro Materials '97, p168 -70, Berlin, 
Germany, April 16-18, 1997.
61.A. Schroth, M. Tanaka, C. Lee, R. Maeda, and S. Matsumoto,
Application of Sol-gel Deposited Piezoelectric PZT-layer - Design of 
a 2D-scanning Actuator Device, Proc. Intern. Conf. Micro 
Materials '97, p626-629, Berlin, Germany, April 16-18, 1997.
62.R. Maeda, C. Lee, T. Itoh, A. Schroth, and T. Suga, Sol-gel 
Derived Ferroelectric Thin Films for Piezoelectric Microsensors and 
Microactuators, Proc. Intern. Conf. Micro Materials '97, p618-621, 
Berlin, Germany, April 16-18, 1997.
63.T. Itoh, C. Lee, J. Chu, and T. Suga, Independent Parallel 
Scanning Force Microscopy Using Pb(Zr, Ti)O3 Microcantilever Array, 
roceedings of IEEE 10th Annual International Workshop on 
Microelectromechanical Systems, MEMS '97, p78-83, Nagoya, Japan, 
IEEE 97CH36021, Jan. 26-30, 1997.
64.R. Maeda, C. Lee, and A. Schroth, Development of a Micromirror 
Using Piezoelectric Excited and Actuated Structures, Mat. Res. Soc. 
Symp. Proc. Vol.444-Materials for Mechanical and Optical 
Microsystems, MRS, Pittsburgh, PA, USA, p233-238, 1996.
65.C. Lee, T. Itoh, J. Chu, T. Ohashi, R. Maeda, A. Schroth, and T. 
Suga, Smart Piezoelectric PZT Microantilevers with Inherent 
Sensing and Actuating Abilities for AFM and LFM, Mat. Res. Soc. 
Symp. Proc. Vol. 459-Materials for Smart Systems II, MRS, 
Pittsburgh, PA, USA, p35-40, 1996.
66.C. Lee, T. Itoh, J. Chu, R. Maeda, and T. Suga, Microfabricated 
Piezoelectric Force Sensing PZT Cantilever Array for Multiprobe 
Scanning Force Microscope, IEEE Intrn. Electr. Dev. and Materials 
Sympo.'96 (IEDMS '96), E4-2-P.323~326, Hsinchu, Taiwan, Dec. 16-20, 
1996.
67.T. Itoh, C. Lee, J. Chu, T. Suga, Piezoelectric Force Sensing 
PZT Microcantilever Array for Multiprobe Scanning Force Microscopy,
Mat. Res. Soc. Symp. Proc. Vol. 444-Materials for Mechanical and 
Optical Microsystems, MRS, Pittsburgh, PA, USA, p59-67, 1996.
68.R. Maeda, C. Lee, A. Schroth, T. Itoh, and T. Suga, Development 
of Micromachined Force Sensors and Optical Mirror Actuators Based on 
Sol-gel Derived Ferroelectric Thin Films," IEEE Intrn. Electr. Dev. 
and Materials Sympo. '96 (IEDMS '96), E4-1-P.319~322, Hsinchu, 
Taiwan, Dec. 16-20, 1996.
69.C. Lee, T. Itoh, R. Maeda, and T. Suga, Smart Force Sensors for 
Scanning Force Microscope Using the Micromachined Piezoelectric PZT 
Cantilevers, Tech. Digest, IEEE Int. Electron Devices Meeting, IEDM 
96, p545-548, San Francisco, CA, USA, Dec. 8-11, 1996.
70.C. Lee, R. Maeda, T. Itoh, and T. Suga, Development of Self-
excited Force Sensing Piezoelectric PZT Microcantilevers for Dynamic 
SFM, Proceedings of the 3rd France-Japan / 1st Europe-Asia Congress 
on Mechatronics, Vol.1, p285-290, Besancon, France, Oct. 1~3, 1996.
71.C. Lee, T. Itoh, J. Chu, R. Maeda, and T. Suga, Micromachined 
Piezoelectric PZT Force Sensors for Scanning Force Microscope,
Proceedings of 3rd International Symposium of Measurement Technology 
and Intelligent Instruments, p328-335, Hayama, Kanazawa Pref., 
Japan, Sep. 30 - Oct. 3, 1996.
72.C. Lee, T. Itoh, R. Maeda and T. Suga, Micromachined 
Piezoelectric Force Sensors Based on Sol-gel Derived PZT and PNNZT 
Thin Films,Proceedings of Microsystem Technologies 96, p357-362, 
Potsdam, Germany, Sep. 17-19, 1996.
73.C. Lee, T. Itoh, G. Sasaki, K. Mizuishi, and T. Suga, Sol-Gel 
Derived PZT Force Sensor for Scanning Force Microscopy, Proceedings 
of IUMRS-Intern. Conf. on Electronic Materials Symposium-94(IECM94), 
Vol.3, p21-26, MRS-T, Hsinchu, Taiwan, 1994.

Awards

Graduate Student Paper Award:International Union of Materials 
Research Society (IUMRS), 1994	
		
		

Teaching Courses

Tutorial:
EE2005 Electronics

Lab:
EE2005 Electronics

Lecture:
EE5516 Plasma Process and Interconnects