Postdoctoral Fellows
Dr Andi Putra (Real-time Monitoring and Control of CD uniformity in Lithography) (2008 - )
Dr Zhao Shao (Real-time Monitoring and Control of CD uniformity in Lithography) (2007 - )
Dr Fu Jun (In-situ Measurement and Control in the Microlithography Process) (2004 - 2007)
 

Current Graduate Students

Name

Degree

 Research Project

Quek Han Yang
(05- )
PhD Computational Intelligence Applications
Tan Chin Hiong
(06- )
PhD Computational Intelligence Applications
Teh Siew Hong
(07- )
PhD Design for Manufacturing
Ngo Yit Sung
(08- )
PhD Semiconductor Manufacturing: Real-time CD control
Yang Geng
(09- )
PhD Semiconductor Manufacturing: Real-time CD control
Qu Yifan
(09- )
PhD Design for Manufacturing
Ang Kar Tien
(10- )
PhD Semiconductor Manufacturing: Optical metrology & real-time CD control
Henry Tan
(10- )
PhD Large format integrated roll-to-roll manufacturing system design, modelling and control.
 

Alumni

Name

Degree

 Research Project

Cai Ji
(01-02)
MEng Distributed Genetic Algorithms
(Main supervisor: Prof. KC Tan)
Xu Huan
(01-03)
 
MEng Computational Intelligence Applications in Life
Sciences
Li Da
(01-03)
MEng Modeling and Control for Chemical Mechanical Polishing
Deng Jiewen
(01-03)
MEng Photoresist Thickness Control
Varadarajan Ganesh Kumar
(01-03)
MEng Signal Processing Issues in
Semiconductor Manufacturing (Chemical Mechanical Polishing)
(Main supervisor: Prof. A A Mamun)
Yang Kai
(02-04)
now at UMCi
MEng Warpage and Temperature Estimation in Microlithography
(Main supervisor: Prof. KC Tan)
Joe Yen Yen
(02-05)
now at SIMTech
MEng Framework for Process Monitoring and Supervision
May Su Tun
(02-05)
now PhD candidate at ChBE, NUS
MEng Multi-rate System Identification
(Main supervisor: Prof L. Samavedham)
Hu Ni
(03-07)
PhD Integrated Metrology for Advanced Process Control in Microlithography
Wu Xiaodong
(03-07)
now at Chartered Semiconductor
PhD Control and Signal Processing for Photoresist Processing
Kiew Choon Meng
(03-08)
now at SIMTech
PhD End-point Monitoring and Control of Photoresist Development Process
Awarded Best Student Paper Prize in 2006 IEEE/ISMI Advanced Semiconductor Manufacturing Conference (ASMC).
Chen Ming
(04-08)
now at TECH Semiconductor
PhD CD Uniformity Control in Lithography
Awarded Best Student Paper Prize (honorable mention) in 2007 Advanced Equipment Control/Advanced Process Control (AECAPC) Symposium.
Wang Yuheng
(04-09)
now at Seagate
PhD Semiconductor Manufacturing: Design of Thermal Processing Systems

To Prospective Graduate Students:
For information on graduate studies and scholarship application in NUS, please refer to the following links:
http://www.gse.nus.edu.sg/applications.html
http://www.nus.edu.sg/registrar/prospective/graduate.html

 

NB: I receive many electronic mails expressing interest in graduate studies at NUS and enquiring about graduate support.  Unfortunately, I do not have time to respond to each of these individual letters, so let me try to pass on a few relevant comments:

Unless you are admitted through the formal process of admission to graduate studies in the ECE department at NUS there is nothing that I can personally do to help you. What you can do is to indicate in your application letter that you are interested to work with me. So the key point is to get admitted through normal channels.

Once you are admitted to the program, we will have plenty of time to explore research interests together.
Best wishes & Good luck!!!