Postdoctoral Fellows | |||
Dr Andi Putra (Real-time Monitoring and Control of CD uniformity in Lithography) (2008 - ) | |||
Dr Zhao Shao (Real-time Monitoring and Control of CD uniformity in Lithography) (2007 - ) | |||
Dr Fu Jun (In-situ Measurement and Control in the Microlithography Process) (2004 - 2007) | |||
Current Graduate Students |
|||
Name |
Degree |
Research Project |
|
Quek Han Yang (05- ) |
PhD | Computational Intelligence Applications | |
Tan Chin
Hiong (06- ) |
PhD | Computational Intelligence Applications | |
Teh Siew Hong (07- ) |
PhD | Design for Manufacturing | |
Ngo Yit Sung (08- ) |
PhD | Semiconductor Manufacturing: Real-time CD control | |
Yang Geng (09- ) |
PhD | Semiconductor Manufacturing: Real-time CD control | |
Qu Yifan (09- ) |
PhD | Design for Manufacturing | |
Ang Kar Tien (10- ) |
PhD | Semiconductor Manufacturing: Optical metrology & real-time CD control | |
Henry Tan (10- ) |
PhD | Large format integrated roll-to-roll manufacturing system design, modelling and control. | |
Alumni |
|||
Name |
Degree |
Research Project |
|
Cai Ji (01-02) |
MEng |
Distributed Genetic Algorithms (Main supervisor: Prof. KC Tan) |
|
Xu Huan (01-03) |
MEng |
Computational Intelligence Applications in Life Sciences |
|
Li Da (01-03) |
MEng | Modeling and Control for Chemical Mechanical Polishing | |
Deng Jiewen (01-03) |
MEng | Photoresist Thickness Control | |
Varadarajan Ganesh Kumar (01-03) |
MEng |
Signal Processing Issues in Semiconductor Manufacturing (Chemical Mechanical Polishing) (Main supervisor: Prof. A A Mamun) |
|
Yang Kai (02-04) now at UMCi |
MEng |
Warpage and Temperature Estimation in Microlithography (Main supervisor: Prof. KC Tan) |
|
Joe Yen Yen (02-05) now at SIMTech |
MEng | Framework for Process Monitoring and Supervision | |
May Su Tun (02-05) now PhD candidate at ChBE, NUS |
MEng |
Multi-rate System Identification (Main supervisor: Prof L. Samavedham) |
|
Hu Ni (03-07) |
PhD | Integrated Metrology for Advanced Process Control in Microlithography | |
Wu Xiaodong (03-07) now at Chartered Semiconductor |
PhD | Control and Signal Processing for Photoresist Processing | |
Kiew Choon Meng (03-08) now at SIMTech |
PhD |
End-point Monitoring and Control of Photoresist Development Process Awarded Best Student Paper Prize in 2006 IEEE/ISMI Advanced Semiconductor Manufacturing Conference (ASMC). |
|
Chen
Ming (04-08) now at TECH Semiconductor |
PhD |
CD Uniformity Control in Lithography Awarded Best Student Paper Prize (honorable mention) in 2007 Advanced Equipment Control/Advanced Process Control (AECAPC) Symposium. |
|
Wang Yuheng (04-09) now at Seagate |
PhD | Semiconductor Manufacturing: Design of Thermal Processing Systems | |
To Prospective Graduate Students:
NB: I receive many electronic mails expressing interest in graduate studies at NUS and enquiring about graduate support. Unfortunately, I do not have time to respond to each of these individual letters, so let me try to pass on a few relevant comments: Unless you are admitted through the formal process of admission to graduate studies in the ECE department at NUS there is nothing that I can personally do to help you. What you can do is to indicate in your application letter that you are interested to work with me. So the key point is to get admitted through normal channels. Once you are admitted to the program, we will have plenty
of time to explore research interests together. |