Journal |
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SH Teh,
CH Heng and A Tay, "Adaptive
library-based device performance-driven optical proximity correction",
Electronics Letters, accepted, 2010.
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A Tay, HT
Chua, Y Wang and YS Ngo, "Equipment design and control of advanced thermal
processing module in lithography", IEEE Transactions on Industrial
Electronics, 57(3), 2010.
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SH Teh,
CH Heng and A Tay, "Performance-based optical proximity correction
methodology", IEEE Transactions on Computer-Aided Design of Integrated
Circuits and Systems, 29(1), 2010.
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A Tay, WK
Ho, XD Wu and XQ Chen, "In-situ monitoring of photoresist thickness
uniformity of a rotating wafer", IEEE
Transactions on
Instrumentation and Measurement,
58(12), 2009.
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HY Quek,
KC Tan and A Tay, "Public
goods provision: An evolutionary game theoretic study under asymmetric
information", IEEE Transactions on Computational Intelligence and AI in
Games, 1(2), 2009.
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HT Chua,
A Tay and YH Wang, "Integrated
bake/chill system for across-wafer temperature uniformity control in
photoresist processing", Journal of Vacuum Science & Technology, Part B, 27(3), 2009.
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KK Tan, S
Zhao, S Huang, A Tay and TH Lee, "A new repetitive control for LTI systems
with input delay", Journal of Process Control, 19(4), 2009.
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HT Chua,
A Tay, YH Wang and XD Wu, "A
heater plate assisted bake/chill system for photoresist processing in
photolithography", Applied
Thermal Engineering, 29(5-6), 2009.
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TW Ng, A
Tay and YH Wang, "Spot focus size effect in spectroscopic ellipsometry of
thin films", Optics Communications, 282(2), 2009.
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WK Ho, A
Tay, J Fu, M Chen and Y Feng, "Critical dimension and real-time temperature
control for warped wafers", Journal of Process Control, 18(10),
2008.
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A Tay, TW
Ng, YH Wang and S Zhao, "Direct
Measurement of Beam Size in a Spectroscopic Ellipsometry Setup", Review
of Scientific Instruments, 79(6), 2008.
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KK Tan, A
Tay, KC Ong, CY Leong, "Mobile Real-time Feedback system for Education",
International Journal of Engineering Education, 24(1), 62-73, 2008.
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WK Ho, A Tay, M Chen, J Fu, HJ Lu, XC Shan,
"Critical Dimension Uniformity via Real-time Photoresist Thickness Control",
IEEE Transactions on Semiconductor Manufacturing, 20(4), 2007.
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WK Ho, A Tay, M Chen, CM Kiew, "Optimal
Feedforward Control for Multizone Baking in Microlithography", Industrial
& Engineering Chemistry Research, 46(11), 2007.
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A Tay, HT Chua, XD Wu, "A Lamp Thermoelectricity
Based Integrated Bake/Chill System for Photoresist Processing". International Journal of Heat & Mass Transfer, 50(3-4), 2007.
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A Tay, WK Ho, N Hu, "An in-situ Approach to
Real-time Spatial Control of Steady-state Wafer Temperature during Thermal
Processing in Microlithography", IEEE Transaction Semiconductor
Manufacturing, 20(1), 2007.
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CS Teo, KK Tan, SY Lim, S Huang and A Tay,
"Dynamic Modeling and Adaptive Control of a H-type Gantry Stage",
Mechatronics, 17(7), 2007.
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KK Tan, S Huang, TH Lee, A Tay, "Disturbance
Compensation incorporated in Predictive Control System using a Repetitive
Learning Approach", Systems &
Control Letters, 56(1), 2007.
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A Tay, WK Ho, XD Wu, "Real-time Control of
Photoresist Extinction Coefficient Uniformity in Microlithography", IEEE
Transaction Control Systems Technology, 15(1), 2007.
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WK Ho, C
Yap, A Tay, W Chen, Y Zhou, WW Tan, M Chen, "Temperature Control and In-Situ
Fault Detection of Wafer Warpage", IEEE Transaction Semiconductor
Manufacturing, 20(1), 2007.
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WW Tan,
JC Tang, AP Loh, A Tay, "In-situ Measurement of Wafer Temperature using Two
Sensors with Different Dynamical Properties", Measurement Science &
Technology, 17(11), 2006.
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N Hu, A Tay, KY Tsai, "A Fast In-situ Approach to
Estimating Wafer Warpage Profile during Thermal Processing in
Microlithography", Measurement Science & Technology, 17(8),
2006.
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A. Tay, W.K. Ho, J.W. Deng and B.K. Lok, "Control
of Photoresist Film Thickness: Iterative Feedback Tuning Approach", Computers
& Chemical Engineering, 30 (3), 2006.
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T.W. Ng, A. Tay and C.J. Ong, "Simple tilt and
height location monitoring of wafers", Optical Engineering,
45(5), 2006.
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A. Tay, W.K. Ho, N. Hu and XQ Chen, "Estimation of
wafer warpage profile during thermal processing in microlithography",
Review of Scientific Instruments, 76(7), 2005.
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Liu, J., K.W. Lim, W.K. Ho, K.C.
Tan, A. Tay and R. Srinivasan, "Practical experiences with the OPC technology for real-time
process monitoring and control", IEEE Software, 22(6), 2005.
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Y.Y. Joe, A. Tay, Z.Y. Dong, H.H. Ng and H. Xu,
"Searching Oligo sets of Human Chromosome 12 using Evolutionary Strategies",
International Journal of Systems Science, 35(13-14), pg787-800, 2004.
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W.K. Ho, A. Tay, Y. Zhou and K. Yang, "In-Situ
Fault Detection of Wafer Warpage in Microlithography", IEEE Transaction Semiconductor Manufacturing,
17(3), 2004.
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A. Tay, W.K. Ho, A.P. Loh, K.W. Lim, W.W. Tan and
C.D. Schaper,
"Integrated Bake/Chill Module with In-situ Temperature Measurement for
Photoresist Processing", IEEE Transaction Semiconductor Manufacturing,
17(2), 2004.
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W.K. Ho, A. Tay, C.D. Schaper and L.L. Lee, "On
Control of Resist Film Uniformity in the Microlithography Process", Control
Engineering Practice, 12(7), 2004.
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A. Tay, W.K. Ho, L.L. Lee and C.D. Schaper,
"Constraint Feedforward Control for Thermal Processing of Quartz Photomasks in
Microelectronics Manufacturing", Journal of Process Control, 14(1),
2004.
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C.D. Schaper, K. El-Awady, T. Kailath, A. Tay, L.L.
Lee, W.K. Ho, and S.E. Fuller, "Processing Chemically Amplified Resists on
Advanced Photomasks Using a Thermal Array", Microelectronics
Engineering,
71(1), 2004.
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C.D. Schaper, K. El-Awady, T. Kailath, A. Tay, L.L.
Lee, W.K. Ho, and S.E. Fuller, "Characterizing Photolithographic Linewidth
Sensitivity to Process Temperature Variations for Advanced Resists Using a
Thermal Array", Applied Physics A: Materials Science & Processing,
published online, Oct 2003.
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K.C. Tan, A. Tay and J. Cai, "Design
and Implementation of a Distributed Evolutionary Computing Software", IEEE
Transactions on Systems, Man and Cybernetics:
Part C (Applications and Reviews),
33(3), 2003.
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Liu, J., K.W. Lim, W.K. Ho, K.C. Tan, R.
Srinivasan, and A. Tay, "The intelligent alarm management system",
IEEE
Software, 20(2), 2003.
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W.K. Ho, L.L. Lee, A. Tay and
C.D. Schaper, "Resist Film Uniformity in the Microlithography Process",
IEEE Transactions Semiconductor
Manufacturing, 15(3), 2002.
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T. Kailath and A. Tay,
"Extending the Life of Optical Lithography", INNOVATION, 2(3), 2001.
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A.
Tay, W.K. Ho and Y.P. Poh, "Minimum Time Control of Conductive Heating Systems
for Microelectronic Processing", IEEE Transactions Semiconductor
Manufacturing, 14(4), 2001.
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W.K. Ho, A. Tay and C.D. Schaper, "Optimal Predictive Control with Constraints for the Processing of
Semiconductor Wafers on Bake Plates", IEEE Transactions Semiconductor
Manufacturing, 13(1), 2000.
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W.K. Ho, T.H. Lee, W. Xu, J.R.
Zhou and A. Tay, "The Direct Nyquist Array Design of PID Controllers",
IEEE
Transactions Industrial Electronics, 47(1), 2000.
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W.K. Ho, T.H. Lee, A. Tay,
"Knowledge-based Multivariable PID Control", Control Engineering Practice,
6(7), 1998.
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W.K. Ho, O.P. Gan, A. Tay,
"Performance and Gain and Phase Margins of Well-Known PID Tuning Formulas",
IEEE Transactions Control Systems Technology, 4(4), 1996.
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Conference |
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A. Tay, W.K. Ho and Y. Zhou, "Warpage
detection during Baking of Semiconductor substrate in Microlithography",
5th European Advanced
Equipment Control/Advanced Process Control (AEC/APC) Conference, April
14-16, 2004,
Germany.
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Y.Y. Joe, H. Xu, Z.Y. Dong, H.H. Ng and A. Tay,
"Searching Oligo Sets of Human Chromosome 12 using Evolutionary Strategies",
Congress on Evolutionary Computation 2003, 8-12 December 2003,
Canberra, Australia.
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M.S. Tun, A. Tay and S
Lakshminarayanan, "Multirate Identification Methods: A Critical Assessment",
Canadian Society for Chemical Engineering Conference 2003, 26-29 October 2003,
Ontario, Canada.
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W.K. Ho, A. Tay, J.W. Deng and
B.K. Lok, "Iterative Feedback Tuning of Photoresist Thickness", AIChE 2003,
San Francisco, USA.
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A. Tay, W.K. Ho, K.W. Lim, A.P.
Loh, and W.W. Tan, "Control and Signal Processing for the Microlithography
Process", AIChE 2003, San Francisco, USA.
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W.K. Ho, A. Tay, K.W. Lim, Y.
Zhou and K. Yang, "Warpage Detection duirng Baking of Semiconductor Substrate
in Microlithography", IECON 2003, Virginia, USA.
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A. Tay, "Control of
Photoresist Thickness Uniformity in the Microlithography Process", IECON 2003,
Virginia, USA.
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A. Tay, W.K. Ho, K.W. Lim, A.P.
Loh and W.W. Tan, "Control and Signal Processing for Photoresist Processing in
Microlithography," IECON, Nov 5-8, 2002, Spain.
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D. Li, G.K. Varadarajan, A.
Tay, A. Abdullah, W.K. Ho, L. Chan and A. See, "Run-to-run Process Control for
Chemical Mechanical Polishing in Semiconductor Manufacturing," 17th IEEE
International Symposium on Intelligent Control, Oct 27-30, 2002.
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H. Xu, A. Tay, Z.Y. Dong, and
H.H. Ng, "Searching Probe Set of Yeast Genome: An implementation of
Evolutionary Strategy," 4th Asian Control Conference, Sept 25-27, 2002.
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A. Tay, W.K. Ho and K.W. Lim,
"Processing of Semiconductor Quartz Photomask on Bake plates," IFAC 15th World
Congress, July 21-26, 2002.
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K.C. Tan, A. Tay, T.H. Lee and
C.M. Heng, "Mining Multiple Comprehensible Classification Rules using Genetic
Programming," IEEE Congress on Evolutionary Computation, 2002.
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A. Tay, W.K. Ho, K.W. Lim,
A.P. Loh, W.W. Tan, A. Huang, “Spatially-Programmable Thermal Processing
Module for 300mm Wafers,?SPIE International Symposium on Microelectronic
and MEMS Technology, May 30-31, 2001.
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A. Tay, C.D. Schaper, S.
Fuller, L.L. Lee and W.K. Ho, “Process Control for Temperature Sensitive
Photoresist using Novel Thermal Processing Module,?6th International
Conference on Control, Automation, Robotics and Vision, Dec 5-8, 2000.
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A. Tay and
W.K. Ho, “Minimum-Time
Optimal Feedforward Control of Conductive Heating Systems for Microelectronics
Processing of Silicon Wafers and Quatz Photomasks,?International Symposium
on Microelectronics and Assembly, Nov 27- Dec2, 2000.
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C.D. Schaper, K. El-Awady, A.
Tay and T. Kailath, "Control Systems for the Nanolithography Process," 1999
IEEE Conference on Decision and Control, December 10, 1999. (invited
paper)
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W.K. Ho, A. Tay, and C.D. Schaper, "Optimal Control of Conductive Heating Systems for Microelectronics
Processing of Silicon Wafers and Quartz Photomasks," IECON?9, 25th
Annual Conference of the IEEE Industrial Electronics Society,
November 25, 1999.
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C.D. Schaper, T. Kailath, K.
El-Awady, and A. Tay, "Applications of Control and Signal Processing to the
Microlithography Process," IECON?9, 25th Annual Conference of
the IEEE Industrial Electronics Society, November 25, 1999.
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C.D. Schaper, K. El-Awady, and
A. Tay, "Spatially-programmable Temperature Control and Measurement for
Chemical Amplified Photoresist Processing," SPIE Symposium on
Microelectronic Manufacturing, September 22, 1999.
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W.K.
Ho, A. Tay, and C.D. Schaper, "Optimal Control Strategy using Linear Programming
for Load Disturbance Compensation in Thermal Processing Systems," SPIE
Symposium on Microelectronic Manufacturing, September 22, 1999.
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C.D. Schaper and A. Tay,
"Electron Beam Patterning on Permeable Polymer Membranes for Nanofabrication
and Microfluidic Applications," Thirteenth Biennial
University/Government/Industry Microelectronics Symposium 1999.
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A. Tay, O.P. Gan and W.K. Ho,
"A Study on Real-time Artificial Intelligence," IFAC Symposium on
Artificial Intelligence in Real-time Control, 1997.
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W.K. Ho, A. Tay, T.H. Lee and
C.C. Hang, "On-line Multiloop Supervisory Knowledge-based PID Control,"
IFAC Symposium on Artificial Intelligence in Real-time Control, 1997.
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