Publications

 

Journal

  1. SH Teh, CH Heng and A Tay, "Adaptive library-based device performance-driven optical proximity correction", Electronics Letters, accepted, 2010.

  2. A Tay, HT Chua, Y Wang and YS Ngo, "Equipment design and control of advanced thermal processing module in lithography", IEEE Transactions on Industrial Electronics, 57(3), 2010.

  3. SH Teh, CH Heng and A Tay, "Performance-based optical proximity correction methodology", IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 29(1), 2010.

  4. A Tay, WK Ho, XD Wu and XQ Chen, "In-situ monitoring of photoresist thickness uniformity of a rotating wafer", IEEE Transactions on Instrumentation and Measurement, 58(12), 2009.

  5. HY Quek, KC Tan and A Tay, "Public goods provision: An evolutionary game theoretic study under asymmetric information", IEEE Transactions on Computational Intelligence and AI in Games, 1(2), 2009.

  6. HT Chua, A Tay and YH Wang, "Integrated bake/chill system for across-wafer temperature uniformity control in photoresist processing", Journal of Vacuum Science & Technology, Part B, 27(3), 2009.

  7. KK Tan, S Zhao, S Huang, A Tay and TH Lee, "A new repetitive control for LTI systems with input delay", Journal of Process Control, 19(4), 2009.

  8. HT Chua, A Tay, YH Wang and XD Wu, "A heater plate assisted bake/chill system for photoresist processing in photolithography", Applied Thermal Engineering, 29(5-6), 2009.

  9. TW Ng, A Tay and YH Wang, "Spot focus size effect in spectroscopic ellipsometry of thin films", Optics Communications, 282(2), 2009.

  10. WK Ho, A Tay, J Fu, M Chen and Y Feng, "Critical dimension and real-time temperature control for warped wafers", Journal of Process Control, 18(10), 2008.

  11. A Tay, TW Ng, YH Wang and S Zhao, "Direct Measurement of Beam Size in a Spectroscopic Ellipsometry Setup", Review of Scientific Instruments, 79(6), 2008.

  12. KK Tan, A Tay, KC Ong, CY Leong, "Mobile Real-time Feedback system for Education", International Journal of Engineering Education, 24(1), 62-73, 2008.

  13. WK Ho, A Tay, M Chen, J Fu, HJ Lu, XC Shan, "Critical Dimension Uniformity via Real-time Photoresist Thickness Control", IEEE Transactions on Semiconductor Manufacturing, 20(4), 2007.

  14. WK Ho, A Tay, M Chen, CM Kiew, "Optimal Feedforward Control for Multizone Baking in Microlithography", Industrial & Engineering Chemistry Research, 46(11), 2007.

  15. A Tay, HT Chua, XD Wu, "A Lamp Thermoelectricity Based Integrated Bake/Chill System for Photoresist Processing". International Journal of Heat & Mass Transfer, 50(3-4), 2007.

  16. A Tay, WK Ho, N Hu, "An in-situ Approach to Real-time Spatial Control of Steady-state Wafer Temperature during Thermal Processing in Microlithography", IEEE Transaction Semiconductor Manufacturing, 20(1), 2007.

  17. CS Teo, KK Tan, SY Lim, S Huang and A Tay, "Dynamic Modeling and Adaptive Control of a H-type Gantry Stage", Mechatronics, 17(7), 2007.

  18. KK Tan, S Huang, TH Lee, A Tay, "Disturbance Compensation incorporated in Predictive Control System using a Repetitive Learning Approach", Systems & Control Letters, 56(1), 2007.

  19. A Tay, WK Ho, XD Wu, "Real-time Control of Photoresist Extinction Coefficient Uniformity in Microlithography", IEEE Transaction Control Systems Technology, 15(1), 2007.

  20. WK Ho, C Yap, A Tay, W Chen, Y Zhou, WW Tan, M Chen, "Temperature Control and In-Situ Fault Detection of Wafer Warpage", IEEE Transaction Semiconductor Manufacturing, 20(1), 2007.

  21. WW Tan, JC Tang, AP Loh, A Tay, "In-situ Measurement of Wafer Temperature using Two Sensors with Different Dynamical Properties", Measurement Science & Technology, 17(11), 2006.

  22. N Hu, A Tay, KY Tsai, "A Fast In-situ Approach to Estimating Wafer Warpage Profile during Thermal Processing in Microlithography", Measurement Science & Technology, 17(8), 2006.

  23. A. Tay, W.K. Ho, J.W. Deng and B.K. Lok, "Control of Photoresist Film Thickness: Iterative Feedback Tuning Approach", Computers & Chemical Engineering, 30 (3), 2006.

  24. T.W. Ng, A. Tay and C.J. Ong, "Simple tilt and height location monitoring of wafers", Optical Engineering, 45(5), 2006.

  25. A. Tay, W.K. Ho, N. Hu and XQ Chen, "Estimation of wafer warpage profile during thermal processing in microlithography", Review of Scientific Instruments, 76(7), 2005.

  26. Liu, J., K.W. Lim, W.K. Ho, K.C. Tan, A. Tay and R. Srinivasan, "Practical experiences with the OPC technology for real-time process monitoring and control", IEEE Software, 22(6), 2005.

  27. Y.Y. Joe, A. Tay, Z.Y. Dong, H.H. Ng and H. Xu, "Searching Oligo sets of Human Chromosome 12 using Evolutionary Strategies", International Journal of Systems Science, 35(13-14), pg787-800, 2004.

  28. W.K. Ho, A. Tay, Y. Zhou and K. Yang, "In-Situ Fault Detection of Wafer Warpage in Microlithography", IEEE Transaction Semiconductor Manufacturing, 17(3), 2004.

  29. A. Tay, W.K. Ho, A.P. Loh, K.W. Lim, W.W. Tan and C.D. Schaper, "Integrated Bake/Chill Module with In-situ Temperature Measurement for Photoresist Processing", IEEE Transaction Semiconductor Manufacturing, 17(2), 2004.

  30. W.K. Ho, A. Tay, C.D. Schaper and L.L. Lee, "On Control of Resist Film Uniformity in the Microlithography Process", Control Engineering Practice, 12(7), 2004.

  31. A. Tay, W.K. Ho, L.L. Lee and C.D. Schaper, "Constraint Feedforward Control for Thermal Processing of Quartz Photomasks in Microelectronics Manufacturing", Journal of Process Control, 14(1), 2004.

  32. C.D. Schaper, K. El-Awady, T. Kailath, A. Tay, L.L. Lee, W.K. Ho, and S.E. Fuller, "Processing Chemically Amplified Resists on Advanced Photomasks Using a Thermal Array", Microelectronics Engineering, 71(1), 2004.

  33. C.D. Schaper, K. El-Awady, T. Kailath, A. Tay, L.L. Lee, W.K. Ho, and S.E. Fuller, "Characterizing Photolithographic Linewidth Sensitivity to Process Temperature Variations for Advanced Resists Using a Thermal Array", Applied Physics A: Materials Science & Processing, published online, Oct 2003.

  34. K.C. Tan, A. Tay and J. Cai, "Design and Implementation of a Distributed Evolutionary Computing Software", IEEE Transactions on Systems, Man and Cybernetics: Part C (Applications and Reviews), 33(3), 2003.

  35. Liu, J., K.W. Lim, W.K. Ho, K.C. Tan, R. Srinivasan, and A. Tay, "The intelligent alarm management system", IEEE Software, 20(2), 2003.

  36. W.K. Ho, L.L. Lee, A. Tay and C.D. Schaper, "Resist Film Uniformity in the Microlithography Process", IEEE Transactions Semiconductor Manufacturing, 15(3), 2002.

  37. T. Kailath and A. Tay, "Extending the Life of Optical Lithography", INNOVATION, 2(3), 2001.

  38.  A. Tay, W.K. Ho and Y.P. Poh, "Minimum Time Control of Conductive Heating Systems for Microelectronic Processing", IEEE Transactions Semiconductor Manufacturing, 14(4), 2001.

  39. W.K. Ho, A. Tay and C.D. Schaper, "Optimal Predictive Control with Constraints for the Processing of Semiconductor Wafers on Bake Plates", IEEE Transactions Semiconductor Manufacturing, 13(1), 2000.

  40. W.K. Ho, T.H. Lee, W. Xu, J.R. Zhou and A. Tay, "The Direct Nyquist Array Design of PID Controllers", IEEE Transactions Industrial Electronics, 47(1), 2000.

  41. W.K. Ho, T.H. Lee, A. Tay, "Knowledge-based Multivariable PID Control", Control Engineering Practice, 6(7), 1998.

  42. W.K. Ho, O.P. Gan, A. Tay, "Performance and Gain and Phase Margins of Well-Known PID Tuning Formulas", IEEE Transactions Control Systems Technology, 4(4), 1996.

Conference

  1. A. Tay, W.K. Ho and Y. Zhou, "Warpage detection during Baking of Semiconductor substrate in Microlithography", 5th European Advanced Equipment Control/Advanced Process Control (AEC/APC) Conference, April 14-16, 2004, Germany.

  2. Y.Y. Joe, H. Xu, Z.Y. Dong, H.H. Ng and A. Tay, "Searching Oligo Sets of Human Chromosome 12 using Evolutionary Strategies", Congress on Evolutionary Computation 2003, 8-12 December 2003,
    Canberra, Australia.

  3. M.S. Tun, A. Tay and S Lakshminarayanan, "Multirate Identification Methods: A Critical Assessment", Canadian Society for Chemical Engineering Conference 2003, 26-29 October 2003, Ontario, Canada.

  4. W.K. Ho, A. Tay, J.W. Deng and B.K. Lok, "Iterative Feedback Tuning of Photoresist Thickness", AIChE 2003, San Francisco, USA.

  5. A. Tay, W.K. Ho, K.W. Lim, A.P. Loh, and W.W. Tan, "Control and Signal Processing for the Microlithography Process", AIChE 2003, San Francisco, USA.

  6. W.K. Ho, A. Tay, K.W. Lim, Y. Zhou and K. Yang, "Warpage Detection duirng Baking of Semiconductor Substrate in Microlithography", IECON 2003, Virginia, USA.

  7. A. Tay, "Control of Photoresist Thickness Uniformity in the Microlithography Process", IECON 2003, Virginia, USA.

  8. A. Tay, W.K. Ho, K.W. Lim, A.P. Loh and W.W. Tan, "Control and Signal Processing for Photoresist Processing in Microlithography," IECON, Nov 5-8, 2002, Spain.

  9. D. Li, G.K. Varadarajan, A. Tay, A. Abdullah, W.K. Ho, L. Chan and A. See, "Run-to-run Process Control for Chemical Mechanical Polishing in Semiconductor Manufacturing," 17th IEEE International Symposium on Intelligent Control, Oct 27-30, 2002.

  10. H. Xu, A. Tay, Z.Y. Dong, and H.H. Ng, "Searching Probe Set of Yeast Genome: An implementation of Evolutionary Strategy," 4th Asian Control Conference, Sept 25-27, 2002.

  11. A. Tay, W.K. Ho and K.W. Lim, "Processing of Semiconductor Quartz Photomask on Bake plates," IFAC 15th World Congress, July 21-26, 2002.

  12. K.C. Tan, A. Tay, T.H. Lee and C.M. Heng, "Mining Multiple Comprehensible Classification Rules using Genetic Programming," IEEE Congress on Evolutionary Computation, 2002.

  13. A. Tay, W.K. Ho, K.W. Lim, A.P. Loh, W.W. Tan, A. Huang, “Spatially-Programmable Thermal Processing Module for 300mm Wafers,?SPIE International Symposium on Microelectronic and MEMS Technology, May 30-31, 2001.

  14. A. Tay, C.D. Schaper, S. Fuller, L.L. Lee and W.K. Ho, “Process Control for Temperature Sensitive Photoresist using Novel Thermal Processing Module,?6th International Conference on Control, Automation, Robotics and Vision, Dec 5-8, 2000.

  15. A. Tay and W.K. Ho, “Minimum-Time Optimal Feedforward Control of Conductive Heating Systems for Microelectronics Processing of Silicon Wafers and Quatz Photomasks,?International Symposium on Microelectronics and Assembly, Nov 27- Dec2, 2000.

  16. C.D. Schaper, K. El-Awady, A. Tay and T. Kailath, "Control Systems for the Nanolithography Process," 1999 IEEE Conference on Decision and Control, December 10, 1999. (invited paper)

  17. W.K. Ho, A. Tay, and C.D. Schaper, "Optimal Control of Conductive Heating Systems for Microelectronics Processing of Silicon Wafers and Quartz Photomasks," IECON?9, 25th Annual Conference of the IEEE Industrial Electronics Society, November 25, 1999.

  18. C.D. Schaper, T. Kailath, K. El-Awady, and A. Tay, "Applications of Control and Signal Processing to the Microlithography Process," IECON?9, 25th Annual Conference of the IEEE Industrial Electronics Society, November 25, 1999.

  19. C.D. Schaper, K. El-Awady, and A. Tay, "Spatially-programmable Temperature Control and Measurement for Chemical Amplified Photoresist Processing," SPIE Symposium on Microelectronic Manufacturing, September 22, 1999.

  20. W.K. Ho, A. Tay, and C.D. Schaper, "Optimal Control Strategy using Linear Programming for Load Disturbance Compensation in Thermal Processing Systems," SPIE Symposium on Microelectronic Manufacturing, September 22, 1999.

  21. C.D. Schaper and A. Tay, "Electron Beam Patterning on Permeable Polymer Membranes for Nanofabrication and Microfluidic Applications," Thirteenth Biennial University/Government/Industry Microelectronics Symposium 1999.

  22. A. Tay, O.P. Gan and W.K. Ho, "A Study on Real-time Artificial Intelligence," IFAC Symposium on Artificial Intelligence in Real-time Control, 1997.

  23. W.K. Ho, A. Tay, T.H. Lee and C.C. Hang, "On-line Multiloop Supervisory Knowledge-based PID Control," IFAC Symposium on Artificial Intelligence in Real-time Control, 1997.

 

Book Chapters

  1. A. Tay, K.C. Tan and J. Cai, "Distributed Evolutionary Strategy for Searching Oligo sets of Yeast Genome", In Recent Advances in Simulated Evolution and Learning, World Scientific, 2004.

  2. L. Xu, Z.Y. Dong and A. Tay, "Time Series Forecast with Elman Neural Networks and Genetic Algorithms", In Recent Advances in Simulated Evolution and Learning, World Scientific, 2004.

 

 

** For updated list of publication, please email me.