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I.
Journal and Conference papers
High-k/Metal Gate/Schottky
Contact
1. H.Y.Yu, J.F.Kang,C.Ren,J.D.Chen, Y.T.Hou, C.Shen,
M.F.Li, DSH Chan KL Bera , CH Tung, DL Kwong, “Robust high-quality
HfN-HfO2 gate stack for advanced MOS device application, IEEE
Electron Device Letts, v.25, no.2, pp.70-72(2004).
2. S.Y.Zhu,
H.Y.Yu, S.J.Whang, J.H.Chen, C.Shen, C.Zhu, S.J.Lee, M.F.Li, DSH Chan, WJ
Yoo, A.Du, C.H.Tung, Jagar Singh, Albert Chin, D.L.Kwong,
“Schottky-Barrier s/d MOSFETs with high-k gate dielectrics and metal-gate
electrode”, IEEE Electron Device Letts , v.25, no.5, pp.268-270(2004).
3. S.Y.Zhu,
J.Chen, M.F.Li, S.J.Lee, J.Singh, C.X.Zhu, A.Du, C.H.Tung, C.H.Tung,
Albert Chin, D.L.Kwong, “N-Type
Schottky-Barrier s/d MOSFETs using Ytterbium Silicide”, IEEE Electron
Device Letts , v.25, no.8, pp.565-657(2004).
4. H.Y.Yu, Chi Ren, Yee Chia
Yeo, J.F.Kang, X.P.Wang, H.H.H.Ma, M.F.Li, DSH Chan, D.L.Kwong,”Fermi
Pinning induced thermal instability of metal gate work functions”, IEEE
Electron Device letts, v.25, n.5, pp.337-339 (2004)
5. H.Y.Yu, M.F.Li and
D.L.Kwong , “Thermally
robust HfN metal as a promising gate electrode for advanced MOS devices
applications”, IEEE. Trans. Electron Devices, v.51,n.4,pp.609-615(2004)
.
6. Xiongfei Yu, Chunxiang Zhu, X.P. Wang, M.F. Li,
Albert Chin, A. Du, W.D. Wang, Dim-Lee Kwong , “High Mobility and Excellent Electrical
Stability of NMOSFETs Using a Novel HfTaO Gate Dielectrics” , Symposium
VLSI Tech, Hawaii, 2004
7. M.F.Li, H.Y.Yu, Y.T.Hou, J.F.Kang, X.P.Wang, C.Shen,
C.Ren, Y.C.Yeo, C.X.Zhu, DSH. Chan , A.Chin, D.L.Kwong, “Selected
Topics on HfO2 Gate Dielectrics for Future ULSI CMOS Devices”
, ( invited) ICSICT2004, Beijing .
8. HY. Yu, HF.Lim, JH
Chen, MF Li, CX Zhu, CH. Tung, AY Du, WD Wang, DZ Chi and DL Kwong, “
Physical and electrical characteristics of HfN gate electrode for
advanced MOS devices “ IEEE Electron Device Letts , v.24,n.4,
p.230-232 ,( 2003) .
9. H.Y. Yu, H.F. Lim,
J.H. Chen, M.F. Li, C.X. Zhu, D.-L. Kwong#, C.H. Tung*, K.L. Bera*, and
C.J. Leo*, “Robust HfN Metal Gate Electrode for Advanced MOS
Devices Application”, Symposium VLSI Technology , Kyoto,2003 .
10.C. H. Huang, M. Y. Yang, Albert Chin, W. J. Chen, C.
X. Zhu, B. J. Cho, M.-F Li, and D. L. Kwong , “Very Low Defects and High
Performance Ge-On-Insulator p-MOSFETs with Al2O3
Gate Dielectrics”, Symposium VLSI Technology, 2003, Kyoto.
11.H.Y.Yu, J.F.Kang,
J.D.Chen, C.Ren, Y.T.Hou, M.F.Li, DSH Chan, D.L.Kwong, K.L.Bera ,
C.H.Tung, “Thermally
Robust High Quality HfN/HfO2 Gate Stack for Advanced CMOS
Devices” , International Electron Device Meeting (IEDM) 2003,Tech Digest,
p.99-102.
12. C.H.Huang,D.S.Yu,Albert
Chin,C.H.Wu,W.J.Chen ,C.X.Zhu, M.F.Li, B.J.Cho and D.L.Kwong,”Fully
Silicide NiSi and Ge NiGe Dual Gates on SiO2/Si and Al2O3/GOI
MOSFETs” IEDM 2003, Tech Digest, pp.319-322.
13.Nan Wu, Qingchun,
Chunxiang Zhu, M.F.Li, DSH Chanh, Albert Chin, D.L.Kwong ,L.K.Bera,
N.Balasubramanian, A.Y.Du, C.H.Tung, Haitao Liu, Johnny K.O.Sin , “ Ge
pMOSFETs with MOCVD HfO2 gate dielectric”, 2003 Int.
Semiconductor Device Research Symposium, Symposium Proceeding ,
pp.252-253.
14.Qingchun Zhang, Nan Wu,
Chunxiang Zhu, M.F.Li, DSH Chan, Albert Chin, D.L.Kwong, L.K.Bera, N.
Balasubramanian, A.Y.Du, C.H.Tung, Haitao, Johnny Sin, “Germanium pMOSFET
with HfON Gate Dielectric”, 2003 Int. Semiconductor Device Research
Symposium, Symposium Proceeding , pp.256-257.
15.H.Y. Yu, N. Wu, M.F. Li, C.X. Zhu, B.J.Cho,D.L.Kwong,
C.H. Tung, J.S. Pan, J.W. Chai, W.D Wang D.Z. Chi, S. Ramanathan , "Thermal
stability of (HfO2)x(Al2O3)1-x on (100) Si", Appl. Phys. Lett.
vol. 81, pp. 3618-3620, 2002
16.H.Y. Yu,M.F. Li, B.J.Cho,C.C. Yeo, M.S. Joo,
D.L.Kwong,J.S.Pan,C.H. Ang,J.Z.Zheng, S.Ramanathan , "Enery
Gap and band Alignment for (HfO2)x(Al2O3)1-x on (100) Si",Appl
Phys. Lett,' vol 81,pp. 376-378, 2002
17.H.Y.Yu,Y.T. Hou,M.F.Li and D.L.Kwong , "Investigation
of Hole Tunneling Current through Ultrathin Oxynitride/Oxide Stack Gate
Dielectrics in p-MOSFET's ",IEEE Trans. Electron Devices,
vol.49, pp.1158-1164, 2002
18.H.Y.Yu,Y.T. Hou,M.F.Li and D.L.Kwong , Hole Tunneling Current
through Oxynitride/Oxide Stack and the Stack optimization for p-MOSFET's
",IEEE Electron Device Letters, vol.23, pp.285-287, 2002
MIM
Capacitors
19.Sun Jung Kim, Byung Jin
Cho, S. J. Ding, M.-F. Li, M. B. Yu, C. Zhu, A. Chin, and D.-L. Kwong “Engineering of Voltage
Nonlinearity in High-K MIM Capacitor for Analog/Mixed-Signal ICs”
Symposium VLSI Tech , Hawaii (2004).
20.S.J.Ding, H.Hu, H.F.Lim,
S.J.Kim, X.F.Yu, C.Zhu, M.F.Li, B.J.Cho, DSH Chan, S.C.Rustagi, A.Cghin,
DL Kwong ,”High-Performance MIM Capacitor using ALD high-k HfO2-Al2O3
laminate dielectrics”, IEEE Electron Device Letts, v.24,n.12, pp.730-732
(2003)
21.S.J.Kim, B.J.Cho, M.F.Li,
X.F.Yu, C.Zhu, A.Chin, D.L.Kwong,”PVD HfO2 for high-precision MIM
capacitor applications”, IEEE Electron Device Letts, v.24,n.6, pp.387-389
(2003)
22.X.F. Yu, C. Zhu, Hang Hu, Albert Chin, MF Li, Byung
Jin Cho, Dim-Lee Kwong , P. D. Foo, Ming Bin Yu , “A High Density MIM
Capacitor (13 fF/μm2) Using ALD HfO2
Dielectrics” , IEEE Electron Device Letts, v.24,n.2, pp.63-65 (
2003).
23.S.J. Kim, Byung Jin Cho, Ming-Fu Li, Chunxiang Zhu,
Albert China, and Dim-
Lee Kwongb
, “HfO2 and Lanthanide-doped HfO2 MIM Capacitors
for RF/Mixed IC Applications”, Symposium VLSI Technology ,
2003, Kyoto.
Pp.77-78.
24.H.Hu, S.J.Ding,H.F.Lim, C.X.Zhu,
M.F.Li, S.J.Kim, X.F.Yu,J.H.Chen, Y.F.Yong, B.J.Cho ,DSH Chan, Subhash C
Rustagi, M.B.Yu, A.Du, D.My, P.D.Fu, Albert Chin, D.L.Kwong, “High
Performance ALD HfO2-Al2O3 Laminate MIM
Capacitors for RF and Mixed Signal IC Applications” IEDM 2003, Tech
Digest, p.379.
CMOS
Device Reliability
25.M.F.Li , D.L.Kwong ,”
Dynamic BTI in Ultrathin SiO2 and HfO2 MOSFETs and its impact on device
lifetime”, IWDTF2004 ( International workshop on dielectric thin films
for future ULSI devices-science and technology, Tokyo, May 2004 (Invited)
26.M.F.Li, G.Chen, C.Shen,
X.P.Wang, H.Y.Yu, Y.C.Yeo, D.L.Kwong, “Dynamic
Bias-Temperature Instability in Ultrathin SiO=2 and HfO2
Metal-Oxide-Semiconductor Field Effect Transistors and its Impact on
Device Lifetime”, Jp.JAP , v.43,n.11B. (2004)
27.Shen Chen, H.Y.Yu,
X.P.Wang, M.F.Li, Y.C.Yeo, DSH. Chan, KL Bera, DL Kwong ,”Frequency
dependent dynamic charge trapping in HfO2 and threshold voltage
instability in MOSFETs “ International Reliability Physics Symposium
(IRPS) 2004, p. 601. Phoenix,2004
28.Shen Chen , M.F.Li, X.P.Wang,
H.Y.Yu, Y.P.Feng, ATL Lim, Y.C.Yeo, DSH Chan , D.L.Kwong “Negative U
Traps in HfO2 Gate Dielectrics and Frequency Dependence of
Dynamic BTI in MOSFETs” , IEDM 2004, Tech Digest, p.733.
29.W. Y. Loh, B J Cho, M F Li,
Daniel S H Chan, C H Ang, J Z Zhen and D L Kwong, “Localized Oxide
Degradation in Ultra-Thin Gate Dielectric and its Statistical
Analysis”, IEEE Tran. ED , 50,n.4,pp.967-972 (2003)
30.G.Chen, K.Y.Chuah, M.F.Li,
DSH Chan, C.H.Ang, J.Z.Zheng, Y. Jin and D.L.Kwong , “Dynamic
NBTI of pMOS transistors and its impact on MOSFET lifetime”, 2003 IEEE
Int. Reliability Physics Symposium (IRPS) , Dallas, pp.196-202,(2003)
31.M.F.Li, B.J.Cho,G.Chen,
W.Y.Loh and D.L.Kwong , New Reliability Issues of CMOS transistors with
1.3nm thick gate oxide, ( invited) , Seventh International Symp on
Silicon Nitride and Silicon Dioxide thin insulating films,
Electrochemical Society , Paris
, 2003.
32.W.Y.Loh,B.J.Cho,M.S.Joo,M.F.Li
and D.L.Kwong,”Analysis of Charge Trapping and Breakdown mechanism in
High-K Dielectric with Metal Gate Electrode using Carrier Separation”
IEDM 2003,Tech Digest, p.927-930.
33.W Y Loh, B J Cho and M F
Li, "Evolution of Quasi-breakdown in Thin Gate Oxides", J. Appl
Phys., vol 91,no.8,p.5302-5306,2002
34.W Y Loh, B J Cho and M F Li, "Correlation
between interface traps and gate oxide leakage current in the direct
tunneling regime", Appl Phys. Lett., vol 81,no.2,p.379-381,2002
35.G.Chen,M.F.Li,Y.Jin, "Interaction
of interface-traps located at various sites in MOSFETs under
stress", IEEE Trans. Reliability, Vol. 51, no.4,pp.387-391,2002
36.G.Chen,M.F.Li,C.H.Ang,J.z.Zhen and D.L.Kwong, "Dynamic
NBTI of pMOS Transistors and its impact on MOSFET scaling", IEEE
Electron Device Letts., vol. 23,n.12, pp.734-736 (2002)
37.B.B.Jie , W.K.Chim, M.F.Li, and K.F.Lo , "
Analysis of the DCIV peaks in electrically-stressed pMOSFET's "
IEEE Trans. ED , vol. 48 , p.913 (2001)
38.Chen Gang , M.F.Li and X.Yu , "
Interface traps at high doping drain extension region in sub-0.25 um
MOSTs " IEEE EDL , vol. 22, p.233 ,(2001)
39.H. Guan , B.J.Cho, M.F.Li,Z.Xu , Y.D.Ho and Z.Dong , "
Experimental evidence of interface-controlled mechanism of
quasi-breakdown in ultra-thin gate oxide " IEEE Trans. ED , vol.48
, p.1010, (2001)
40.S,G,Ma , Y.H.Zhang, M.F.Li, W.D.Li, J. Xie, GTT.
Sheng, A.C.Yen and JLF Wang , "
Gate-Induced Drain Leakage Current Enhanced by Plasma Charging Damage
", IEEE Trans., Electron Devices , vol. 48, p.1006 (2001)
41.G. Chen , M.F.Li and Y.Jin , Electrical passivation of
interface traps at drain junction space charge region in p-MOS
transistors , Proceeding 12th ESREF , 1-5, Oct ,2001 , Bordeaux ,(
France) , paper B12, (2001).
42.M.F.Li , " Selected Topics in CMOS Transistor
Reliability " ( invited ) , 4th SRC-SEMATECH Topical Research
Conference on Reliability , Stanford University , CA , Oct.30-Nov.1 ,
2000 .
43.H.Guan, M.F.Li, Y.D.He, B.J.Cho and Z.Dong, " A
Thorough Study of Quasi-Breakdown Phenomenon of Thin Gate Oxide in
Duel-Gate CMOSFET's ", IEEE transactions on Electron Devices,
vol 47, no. 8, p.1608, (2000).
Nano Device Quantum
Modeling and Simulation
44.Tony Low, M.F.Li, W.J.Fan,
S.T.Ng, Y.C.Yeo, C.Zhu, A.Chin ,L.Chan, D.L.Kwong,”
Imapact of Surface
Roughness on Si and Ge Ultra-thin-Body MOSFETs”, IEDM 2004 Tech Digest
,p.151.
45.Tony Low, Chen Shen,
M.F.Li, Y.C.Yeo, Y.T.Hou, C.Zhu, A.Chin, L.Chan, D.L.Kwong
“Study
of Mobility in Starined Si and Ge Ultra-thin-Body MOSFETs”, SSDM, Tokyo,
p.776 (2004)
46.Tony Low, M.F.Li, C.Shen,
Y.C.Yeo, Y.T.Hou, C.Zhu, A.Chin, D.L.Kwong,"Electron mobility in Ge
and strained-Si channel ultra-thin-body MOSFETs", Appl. Phys. Letts
2004
47.Y.T.Hou, M.F.Li, T.Low and
D.L.Kwong, ”Metal Gate Workfunction Engineering on Gate Leakage of
MOSFETs”, IEEE Trans. Electron Devices, v.51, n.11, pp.1783-1789(2004).
48.Tony Low , Y.T.Hou, M.F.Li
and Dim-Lee Kwong “Improved one-band self-consistent effective mass
methods for hole quantization in p-MOSFET”, IEEE Trans. ED , v.50, n.5,
pp.1284-1289 (2003) .
49.Y.T. Hou, M.F. Li, D.L.
Kwong, “Modeling
of Tunneling currents through HfO2 and HfAlO gate
stacks and their scalability in CMOS technology, IEEE Electron Device
Lett.v.24,n.2,pp.96-98 (2003).
50.Tony Low, Y. T.
Hou, M. F. Li, Chunxiang Zhu , D. -L. Kwong# , and Albert Chin,
“Germanium MOS: An Evaluation from Carrier Quantization and Tunneling
Current”
VLSI Technology Symposium
,2003, Kyoto
.
51.Tony Low, Y.T.Hou, M.F.Li, C.X.Zhu, Albert Chin ,
G.Samudra and D.L.Kwong, “Investigation
of performance limits of Ge double-gated MOSFETs” IEDM 2003, Tech Digest , p.691-694.
52.Y.T. Hou, M.F. Li, Y.Jin and W.H. Lai , Direct
tunneling Hole Current through Ultrathin Gate Oxides in
Metal-Oxide-Semiconductor Devices, J. Appl Phys. , Vol.91, pp.
258-264, 2002
53.Y.T. Hou, M.F. Li, D.L. Kwong, Quantum Tunneling and
Scalability of HfO2 and HfAlO Gate Stacks, in Tech Digest International
Electron Device Meeting (IEDM), San Francisco, CA, pp.731-734, 2002.
54.Y.T.Hou and M.F.Li , “
Hole quantization effects and threshold voltage shift in pMOSFET-Assessed
by improved one-band effective mass approximation “, IEEE Trans. ED.
Vol.48 ,pp.1188-1193, (2001)
55.Y.T.Hou ,M.F.Li,,W.H.Lai and Y.Jin , “
Modeling and Characterization of Direct Tunneling Hole Current through
Ultrathin Gate Oxide in p-metal-oxide-semiconductor field-effect
transistors “ , Appl. Phys. Lett. 78, pp.4034-4036, (2001)
56.Y.T.Hou , M.F.Li , “ A
simple and efficient model for quantization effects of hole inversion
layers in MOS devices “ , IEEE Trans. ED, vol.48, pp.2893-2898,
(2001).
57.Y.T.Hou , M.F.Li and Y.Jin, Hole quantization and hole
direct tunnelling in deep submicron p-MOSFETs , 6th ICSICT 2001 ,
Shanghai (China ), ( invited ) ,pp. 895-900(2001).
Others
58.C.Y.Lin,
A.Chin, Y.T.Hou, M.F.Li, S.P.McAllister and D.L.Kwong, “Light emission
near 1.3 um using ITO-Al2O3-Si0.3Ge0.7-Si
tunnel diodes”, IEEE Photonics Technology Lett. Vol.16, no.1, pp.36-38
(2004).
59.Luo Zhenying, M.F Li, Yong Lian and S.C.Rustagi CMOS
TRANSCONDUCTOR DESIGN FOR VHF FILTERING APPLICATIONS , Proceedings of the
2003 IEEE ISCAS , May ,2003, Bangkok , Thailand .
60.A.M.Xu , M.F.Li, A 1.2V Rail-to-rail differential mode
input linear CMOS transconductor , Proceedings of the 2002 IEEE ISCAS ,
May ,2002, Phoenix , Arizona
61. Y.J.Ha , M.F.Li
and A.Q.Liu , "
A new CMOS buffer amplifier design used in low voltage MEMS interface
circuits " Analog Integrated Circuits and Signal Processing ",
vol. 27 , 5 (2001)
62.M.F.Li, Uday Dasgupta, X.W.Zhang and Y.C.Lim, " A
low-voltage CMOS OTA with rail-to-rail differential input range
" IEEE Trans. Circuits and Systems - I ,47, Jan (2000).
II. Books and Chapters in Books
M.F.Li and P.Y.Yu, " High pressure study of DX
centers using capacitance techniques " in " High Pressure in
Semiconductor Physics I ", ( invited review article ) Semiconductors
and Semimetals, Vol. 54, eds T.Suski and W. Paul, (Academic Press, San
Diego), 1998.
Ming-Fu Li, Modern Semiconductor Quantum Physics,
International Series on Advances in
Solid State
Electronics and Technology, Founding Editor : Chih-Tang Sah. ( World
Scientific, Singapore.)
1994.
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