Class 100 clean room

Fabrication tools

Multi target sputtering system
Electron beam lithography system (EBL)
Molecular beam epitaxy system (MBE)
Thermal and e-beam evaporator

Micro patterning and processing equipment

Mask aligner (online booking system)
Spin coater
Hot plate
Wire Bonder
Ozone stripper
Ion-beam etcher

Characterization tools

10K cryostat
Magnetoresistance measurement kit
4-point probe system
Microscopic optical characterization system
Surface profiler
Scanning electron microscope (SEM)
Scanning probe microscopy (SPM/AFM/MFM) system
Vibrating sample magnetometer (VSM)