TOPIC Nanometrology using Scanning Probe Microscopy Methods 
AREA Microelectronic Technologies & Devices  
SPEAKER Professor Teodor Gotszalk, Wroclaw University of Technology/Poland,Faculty of Microsystems Electronics and Photonics,Nanometrology Division  
DATE 24 October 2014, Friday 
TIME 10:00 am to 11:00 am 
VENUE E4-04-03, Engineering Blk E4, Faculty of Engineering, NUS 
FEES No Charge 

Scanning probe microscopy (SPM) belongs to the high resolution methods for imaging of micro- and nanostructures. This technology has been used successfully in the university and industry research laboratories for over two decades. Despite progress in this field a lot of effort must be done in order to enable quantitative (in other words metrological) surface investigations. In this presentation latest results on applications of the SPM related methods will be presented. This will include surface measurements performed with piezoresistive nanotools for electrical, thermal and optical sample parameters. The scanning probe microscopy based technologies are also used in high resolution and precise biotechnological investigations. Results of the application of the cantilever based technologies in detection of Gram negative endotoxins and biofilm growth will be also presented.  

Teodor P. Gotszalk received the M.Sc., Ph.D., and D.Sc. degrees in 1989, 1996, and 2005, respectively. His Ph.D. Thesis was awarded with the Siemens research prize in 2000. From 1993 to 1995 he was a Deutscher Akademischer Austauschdienst fellow at the University of Kassel, Germany where he worked on the application of piezoresistive cantilevers in scanning probe microscopy. He was also a fellow of the Polish Science Foundation in 1997. In the period of 19962010 he spent about three years working at the University of Kassel, at the Siemens A.G. Corporate Technology Microsystem Technology Centre 2 in Germany, and as a Fulbright Commission Fellow at the State University of New York in Albany at the College of Nanoscience and Engineering.
At present T.P. Gotszalk is an Associate Professor at the Wroclaw University of Technology in Poland. He is a leader of the Nanometrology group at the Faculty of Microsystem Electronics and Photonics of this university. His scientific interests concentrate on application of modular scanning probe microscopy in diagnostics of micro− and nanoelectronic materials and devices, measurements of low forces and nanodisplacements with MEMS sensors and actuators, application of optical fibre techniques and optoelectronics in nanometrology. During last 10 years he published more than 120 papers.


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