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Patents, Publications List for 1998-1999

1. EF Chor, WK Chong, and CH Heng, "Alternative (Pd,Ti,Au) contacts to (Pt,Ti,Au) contacts for In_0.53Ga_0.47As, Journal of Applied Physics, vol.84, no.5, pp-2977-2979, (1998)

2. SJ Chua, and ZH Zhang, "Indium incorporation coefficients in the growth of AlInGaAs/Al_0.3Ga_0.7As quantum wells by molecular beam epitaxy", Japanese Journal of Applied Physics, part 1, 37, 6A (1998)

3. SJ Chua, SJ Xu, XH Zhang and X Zhang, "Carrier capture in InAs monolayer quantum wells grown on GaAs substrates", Microelectronics and Reliability, vol.43 ,pp-4, (1998)

4. SJ Chua, SJ Xu, XH Zhang, WC Wang, T Mei and W J Fan, "Polarization dependence of intraband absorption in self-organized quantum dots",.Applied Physics Letters, vol. 73, no.14 , pp-1997-1999, (1998)

5. EH Lim, G Karunasiri, SJ Chua, H Wong, KL Pey, and KH Lee, "Monitoring of TiSi₂ formation on narrow polycrystalline silicon lines using raman spectroscopy", IEEE Electron Device Letters,vol.19, pp-171-173, (1998)

6. EH Lim, G Karunasiri, SJ Chua, ZX Shen, H Wong, KL Pey, KH. Lee and L Chan, "Characterization of titanium silicide by raman spectroscopy for sub-micron IC processing", Microelectronic Engineering (1998)

7. MAG Halliwell, and SJ Chua, "Determining substrate orientation using a high-resolution diffractometer". Journal of Crystal Growth, vol.192 (3-4), pp-456-461, (1998)

8. CS Ho, KL Pey, H Wong, G Karunasiri, SJ Chua, KH Lee and L Chan, "Integration of salicide process for sub-micron CMOS technology: effect of nitrogen/argon-amorphized implant on salicide formation", Materials Science and Engineering, vol.51 (1998)

9. J Jian, JX Zhou, ZT Zhong and SJ Chua, "Atom diffusion during MBE growth on patterned substrates", Microelectronics Engineering, m43 , 4, (1998)

10. K Fleischer, M Toth, MR Phillips, J Zou, G Li and SJ Chua, "Depth profiling of GaN by cathodoluminescence microanalysis", Applied Physics Letters, vol.74, no.8, pp-1114-1116, (1999)

11. L Cha, EF Chor, H Gong, AQ Zhang, L Chan, and Joseph Xie, "Evaluation of the dielectric breakdown of reoxidized nitride oxide (ONO) in flash memory devices using constant current-stressing technique", Microelectronics Reliability, vol.38, pp.1439-1446, (1998)

12. G Li, A Babinski, SJ Chua and C Jagadisk, "Electron transfer efficiency of Si d -modulation-doped pseudomorphic GaAs/In_0.2Ga_0.8As/Al_xGa_1-xAs",Applied Physics Letters, vol.72, no.18, pp-2322-2324, (1998)

13. G Li, KE Prince, M Petravic, SJ Chua and C Jagadish, "Substrate orientation effect on Zn d -doping in GaAs grown by metal organic vapour-phase epitaxy", Journal of Crystal Growth, vol.191(3), pp-357-360, (1998)

14. G Li, S Yuan, HH Tan, XQ Liu, SJ Chua and C Jagadish, "In_0.2Ga_0.8As/GaAs quantum well laser with C doped cladding and ohmic contact layers", Journal of Electronics Materials, 27, 9 (1998)

15. G Li, SJ Chua, SJ Xu, XC Wang, AS Helmy and ML Ke, "Silica capping for Al0.3Ga0.7As/GaAs and In0.2Ga0.8As/GaAs quantum well intermixing", Applied Physics Letters, vol. 73, no.23, pp-3393-3395, (1998)

16. G Li, MB Johnston, A Babinski, S Yuan, M Gal and SJ Chua, " Si and C d -doping for device applications", Journal of Crystal Growth, vol.195 (1-4), pp-54-57, (1998)

17. EH Lim, G Karunasiri, SJ Chua, ZX Shen, H Wang, KL Pey and KH Lee, "Characterisation of titanium silicide by raman spectroscopy for Submicron IC processing", Microelectronics Engineering, 43, 4 (1998).

18. EH Lim, G Karunasiri, SJ Chua, H Wang, KL Pey and KH Lee, "Monitoring of TiSi₂l formation on narrow polycrystalline silicon lines using raman spectroscopy", IEEE Electron Device Letters, 19 (1998)

19. W Liu, TK Leong, MF Li, SJ Chua, K Uchida, H Tokunaga, N Akutsu and K Matsumoto, "The study of piezoelectric effect in wurtzite GaN/InGaN/AlGaN multilayer structures", Journal of Crystal Growth, vol.190 (1-4) , pp. 648-651, (1998)

20. WC Ng, and SJ Chua, " The design of a twin-rib waveguide optical switch by the discrete spectral index method", Microwave and Optical Technology Letters, 18, 5 (August 1998)

21. WX Que, Y Zhou, YL Lam, YC Chan, B Liu, LM Gan, CH Chew, GQ Xu, SJ Chua, QJ Xu and FVC Mendis, "Photoluminescence and electroluminescence from copper doped zinc sulphide nanocrystals", Applied Physics Letters, vol.73, no.19, pp-2727-2729, (1998)

22. RVVVJ Rao, TC Chong, WS Lau, LS Tan, G Chen and NN Lim, "Low frequency noise analysis of LT-GaAs and LT-Al0.3Ga0.7As MISFET active layers", Electronics Letters, vol. 34, no.21, pp. 2066 - 2067, (1998)

23. LS Tan, MS Leong and SC Choo, "Theory for the determination of backside contact resistance of semiconductor wafers from surface potential measurements", Solid-State Electronics, vol.42, no.4, pp-589-594, (1998)

24. ZJ Wang, SJ Chua, F Zhou, W Wang and RH Wu, "Buried heterostructure InGaAsP/InP strain-compensated multiple quantum well laser with native-oxidized InAlAs current blocking layer", Applied Physics Letters, vol. 73, no.26, pp-3803-3805, (1998)

25. ZJ Wang, SJ Chua, F Zhou, W Wang and RH Wu, "Native-oxidized InAlAs current blocking layer Buried heterostructure InGaAsP/InP MQW laser for high temperature operation" IEEE Photonics Technology Letters, vol.11, no.1, pp-1041-1135, (1999)

26. XC Wang, SJ Xu, SJ Chua, K Li, XH Zhang, ZH Zhang, KB Chong and X Zhang, "Strong influence of SiO2 thin film on properties of GaN epilayers", Applied Physics Letters, vol.74, no.6, pp-818-820, (1999)

27. X Gu. G Karunasiri, G Chen, U Sridhar and B Xu, "Determination of thermal parameters of microbolometers using a single electrical measurement", Applied Physics Letters, vol.72, no.15, pp-1881-1883 (1998)

28. X Gu, G Karunasiri, J Yu, G Chen, WJ Zeng, and U Sridhar, "A new on-chip compensation of self-heating effects in microbolometer infrared detector arrays", Sensors & Actuators, vol. 69, pp-92-96 (1998)

29. SJ Xu, SJ Chua, B Liu, LM Gan, CH Chew and GQ Xu, "Luminescence characteristics of impurities-activated ZnS nanocrystals prepared in microemulsion with hydrothermal treatment", Applied Physics Letters, vol.73, no.4, pp-478-480, (1998)

30. SJ Xu, SJ Chua, T Mei, XC Wang, XH Zhang and G Karunasiri, "Characteristics of InGaAs quantum dot infrared photodetectors", Applied Physics Letters, vol.73, no.21, pp-3153-3155, (1998)

31. YC Yeo, TC Chong and MF Li, "Electronic band structures and effective-mass parameters of Wurtzite GaN and InN", Journal of Applied Physics, vol.83, no.3, pp1429-1435, (1998)

32. YC Yeo, TC Chong, MF Li and WJ Fan, "Electronic band structures and optical gain spectra of strained wurtzite GaN-Al_XGa_1-X quantum-well lasers", IEEE Journal of Quantum Electronics, vol.34, no. 3 (1998)

33. XH Zhang, SJ Chua, SJ Xu and WJ Fan, "First-principles calculation of GaAs_1-xP_x - Al _0.3Ga _0.7As (001) band offsets", Journal of Physics : Condensed Matter, Vol.10, No.3, pp-577-580, (1998)

34. X Zhang, SJ Chua, W Liu and KB Chong, "Photoreflectance study of Si-doped GaN grown by metal-organic chemical vapour deposition", Applied Physics Letters, vol.72 , no.15, pp-1890-1892, (1998)

35. X Zhang, SJ Chua, P Li, KB Chong and W Wen, "Improved Mg-doped GaN films grown over a multilayered buffer", Applied Physics Letters, vol.73, no.13, pp-1772-1774, (1998)

36. X Zhang, SJ Chua and WJ Fan, "Band offsets at GaInP/AlGaInP (001) heterostructures lattice matched to GaAs",Applied

    Physics Letters, vol.73, no.9,pp-1098-1100, (1998)

37. X Zhang, SJ Chua, W Liu, KB Chong, "Photoreflectance study of band-gap renormalization in Si-doped GaN", Journal of Crystal Growth, vol.190(1-4 ), pp. 687-691, (1998)

38. X Zhang, SJ Chua, P Li, KB Chong and ZC Feng, "Enhanced optical emission from GaN films grown on a silicon substrate", Applied Physics Letters, vol.74, no.14, pp-1984-1986, (1999)

     

 CONFERENCE PAPERS

1. CL Cha, EF Chor, H Gong, TH Teo, AQ Zhang, and L Chan, ‘Threshold voltage instabilities of fresh flash memory devices caused by plasma charging’, Proceedings 1998 3^rd International Symposium on Plasma Process-Induced Damage, pp.120-123, 3-5 June 1998.

2. CL Cha, EF Chor, H Gong, TH Teo, AQ Zhang, and L Chan, ‘Application of a negative sweep voltage to control gate of fresh flash memory devices to facilitate threshold voltage test measurement’, IEEE 6^th International Conference on Conduction and Breakdown in Solid Dielectrics, 22-25 June 1998.

3. HW Choi, and SJ Chua, "Lattice dynamics caculation of zone centre phonon frequencies for gallium nitride", 4^th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore , Singapore, edited by S J Chua and S Jaenicke, pp. 161-164. Singapore: Institute of Materials Research and Engineering, 27 March 1998.

4. G Karunasiri, X Gu, G Chen, and U Sridhar "Extraction of thermal parameters of microbolometer infrared detectors using electrical measurement", SPIE Conference on Infrared Technology and Applications XXIV, 10-24 July, 1998, San Diego, California

5. CS Ho,G Karunasiri, SJ Chua, KL Pey, LH Chan, KH Lee and CH Tung, "Process integration issues of a high temperature CO/Ti salicide process for sub-quarter micron CMOS technology", Paper presented at 15^th VLSI Multilevel Interconnection Conference, 15-19 June 1998, Santa Clara Marriot Hotel, Santa Clara, United State.

6. CS Ho,G Karunasiri, SJ Chua, KL Pey, SY Siah, KH Lee and LH Chan, "Implantation-induced degradation mechanism on pMOSFET series resistance for deep sub-micron titanium salicide process" paper presented at 15^th VLSI Multilevel Interconnection Conference, 15-19 June 1998, Santa Clara Marriot Hotel, Santa Clara, United State

7. CS Ho,G Karunasiri, SJ Chua, KL Pey, SY Siah, KH Lee and LH Chan, "Correlation of film thickness and deposition temperature with pai and the stability of Ti-salicide technology to 0.18 um regime", paper presented at 1^st International Interconnect Technology Conference, 1-3 June 1998, San Fransisco Airport Hyatt Regency, San Fransisco, United State.

8. YT Hou, ZC Feng, MF Li and SJ Chua, "Characterization of MBE grown GaAlAs alloy filure by raman scattering", Asia-Pacific Surface & Interface Analysis Conference, 30 November- 4 December 1998, Singapore.

9. HK Khoo, SJ Chua and G Karunasiri, "The Optical gain of tensile strained InGaAs/AlGaInAs MQW laser emitting at 1.55 ?m", 4^th National Symposium on Progress in Materials Research.27 March 1998, National University of Singapore, Singapore, edited by S J Chua and S Jaenicke, pp 190-193. Singapore:Institute of Materials Research and Engineering, 27 March 1998.

10. G Li, SJ Chua and W Wang, "Observation of correlation between Mg incorporation and epitaxial growth of GaN on sapphire", 4^th National Symposium on progress in Materials Research, 27 March 1998, , National University of Singapore, Singapore, edited by S J Chua and S Jaenicke, pp 169-171. Singapore:Institute of Materials Research and Engineering, 27 March 1998.

11. G Li, MB Johnston, A Babinski, S Yuan, M Gai and SJ Chua, "Si and C d -doping for device applications", 9^th International Conference on Metal Organic Vapour Phase Epitaxy, 31 May- 4 June 1998, La Jolla, California, United State, edited by American Association for Crystal Growth, pp 196-197, United State, June 1998.

12. W Liu, MF Li, SJ Chua, YH Zhang and K Uchida, "Study on excitonic absorption in wurztite GaN by photo voltaic spectra at room temperature", 7th International Symposium on IC Technology, Systems and Applications, pp. 243-245. Singapore, September 1997.

13. W Liu, MF Li, and SJ Chua, "Photoreflectance study on the surface states of n-type GaN", Proceeding of 24^th International Conference on Physics of Semiconductors, ICPS’98, 2-7 August 1998, Jerusalem, Israel, pp MO-p168. Jerusalem, August 1998.

14. W Liu, MF Li, ZC Feng and SJ Chua, "Material properties of GaN grown by MOCVD", Asia-Pacific Surface & Interface Analysis Conference, 30 November- 4 December 1998, Singapore.

15. W Liu, MF Li, SJ Chua, T Mei, SJ Xu and D Lu, "Infrared reflection studies of MOCVD grown GaN", 4^th National Symposium on progress in Materials Research, 27 March 1998, National University of Singapore, Singapore, edited by S J Chua and S Jaenicke, pp 157-160. Singapore:Institute of Materials Research and Engineering, 27 March 1998.

16. RG Mazur, SM Ramey, CL Hartford, EJ Hartford, M Kuono and LS Tan, "Verification of carrier density profiles derived from spreading resistance measurements by comparing measured and calculated sheet resistance values", Proc. 1998 International Conference on the Characterization and Metrology for ULSI Technology, pp. 226 - 230, 23 - 27 March, 1998, National Institutes of Standards and Technology, Gaithersburg, USA.

17. A Raman, ZH Zhang and SJ Chua, "High resolution X-ray characterization of InGaAlAs/AlGaAs quantum well structures", 4th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore, Singapore, edited by S J Chua and S Jaenicke, pp 143-146. Singapore: Institute of Material Research and Engineering, 27 March 1998.

18. RVVVJ Rao, TC Chong, LS Tan, WS Lau and G Chen, "Low frequency noise behaviour of LT-GaAs and LT-Al0.3Ga0.7As MISFET channels", 5th IUMRS International Conference in Asia, pp. 195 - 196, 13 - 16 Oct. 1998, Indian Institute of Science, Bangalore, India.

19. Rao RVVVJ, TC Chong, LS Tan and WS Lau, "Effects of thermal stress on low-temperature-grown GaAs and Al0.3Ga0.7As and MISFET parameters", Conference on Optoelectronic and Microelectronics Materials and Devices (COMMAD 98), pp. 103 - 104, 14 - 16 Dec. 1998, University of Western Australia, Perth, Australia.

20. Saket, S and SJ Chua, Simulation of exciting power dependence of photoluminescence spectra of GaP:N grown by LPE" 4^th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore , Singapore, edited by S J Chua and S Jaenicke, pp. 180-182. Singapore: Institute of Materials Research and Engineering, 27 March 1998.

21. Tan, LS, MS Leong, KL Ong, SC Choo, CL Hartford and RG Mazur, "Characterization of ultra-shallow doping profiles in silicon by the spreading resistance technique", Proceedings of SEMICON 98 Technical Symposium, 5-7 May 1998, Singapore International Convention & Exhibition Centre, Singapore. Singapore: Semiconductor Equipment and Materials International (Accepted for publication).

22. Tan LS and FNL Huynh, "Measurement of minority carrier diffusion lengths in semiconductor wafers with non-uniform carrier lifetimes by the surface photovoltage technique", Conference on Optoelectronic and Microelectronics Materials and Devices (COMMAD 98), pp. 105 - 106, 14 - 16 Dec. 1998, University of Western Australia, Perth, Australia.

23. XC Wang, SJ Xu, SJ Chua, X Zhang, ZH Zhang and KB Chong, "Influence of oxygen in SiO2 on the photoluminescence of GaN", 4^th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore , Singapore, edited by S J Chua and S Jaenicke, pp. 151-153. Singapore: Institute of Materials Research and Engineering, 27 March 1998.

24. ZJ Wang, SJ Chua, F Zhou, HL Zhu, W Wang and RH Wu, "1.5um buried heterostructure InGaAsP/InP MQW laser with native-oxidized InAlAs current blocking layer", 16^th International Semiconductor laser Conference, 4 October 1998, Nara, Japan, pp 157-158.

25. X. Gu, J. Yu, G. Karunasiri, and U. Sridhar, "Modelling and simulation of self-heating effect of microbolometers using PSPICE", MINDEF-NUS Joint R & D Seminar, January 22, (1999)

26. M Xu, WC Ng, TM Ko, A Raman, SJ Chua, FC Loh, KL Tan, SYM Chooi and J Sudijiono, "Silicon oxynitride film as the bottom antireflective coating in sub-quarter-micron lithography", 4^th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore , Singapore, edited by S J Chua and S Jaenicke, pp. 151-153. Singapore: Institute of Materials Research and Engineering, 27 March 1998.

27. SJ Xu, G Li, SJ Chua, XC Wang and W Wang, "New metastable defect emitting blue light in undoped GaN epilayers, El2 level in GaN?" Proceeding of 24^th International Conference on Physics of Semiconductors, ICPS’98, 2-7 August 1998, Jerusalem, Israel, pp MO-p168. Jerusalem, August 1998.

28. YH Chee. and G Karunasiri "Modelling of quantum well infrared detectors using PSPICE", MINDEF-NUS Joint R & D Seminar, January 22, (1999).

29. KP Yar, and SJ Chua , "Transitions between localised states above barrier in quantum well structures", 4^th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore , Singapore, edited by S J Chua and S Jaenicke, pp. 194-197. Singapore: Institute of Materials Research and Engineering, 27 March 1998.

30. XH Zhang, SJ Chua, SJ Xu and WJ Fan, "First-principles calculation of valence band offsets at Ga_1-xAl_x\GaN (001) heterostructures", 4^th National Symposium on Progress in Materials Research, 27 March 1998, National University of Singapore , Singapore, edited by S J Chua and S Jaenicke, pp. 27-29. Singapore: Institute of Materials Research and Engineering, 27 March 1998.

31. XH Zhang, SJ Chua, and WJ Fan, "Oxygen impurity in GaN, AlN and InN.In", Proceeding of 24^th International Conference on Physics of Semiconductors, ICPS’98, 2-7 August 1998, Jerusalem, Israel, pp MO-p168. Jerusalem, August 1998.

32. X Zhang, SJ Chua, P Li and KB Chong, "Enhanced optical emission from GaN films grown on composite intermediate layers", MRS 1999 Spring Meeting, 5-9 April 1999, San Francisco Marriott Hotel, United State (Accepted for presentation).